Stick-slip driving cross-scale precision positioning platform provided with side part friction force adjusting mechanism

Abstract

The invention discloses a stick-slip driving cross-scale precision positioning platform provided with a side part friction force adjusting mechanism. The stick-slip driving cross-scale precision positioning platform comprising a base table, a sliding block, a sliding table, a guide rail and a stacking-type piezoelectric ceramic actuator, wherein the side part friction force adjusting mechanism is arranged between the sliding table and the sliding block; the side part friction force adjusting mechanism comprises an adjusting flexible hinge, a friction block, an adjusting piezoelectric ceramic and an adjusting pre-tightening bolt which is used for pre-tightening the adjusting piezoelectric ceramic; and the side part friction force adjusting mechanism is arranged on an inertia mass block and integrally machined with the inertia mass block. The stick-slip driving cross-scale precision positioning platform achieves coarse adjustment and fine adjustment of the friction force between the sliding block and the sliding table, thereby avoiding variation of a friction force between a sliding block and a sliding table of a traditional stick-slip driving cross-scale precision positioning platform due to load variation, improving load capacity of the stick-slip driving cross-scale precision positioning platform, simplifying the excitation adjustment method of the stick-slip driving platform, being easy to process and assemble, enhancing output performance, movement precision and consistency of the stick-slip driving cross-scale precision positioning platform, and being suitable for batch production.

Description

technical field [0001] The invention relates to the technical field of precision motion, in particular to a stick-slip drive cross-scale precision positioning platform with a side friction force adjustment mechanism. Background technique [0002] With the rapid development of micro / nano technology, there is an urgent need for micro / nano-scale ultra- Precision drive mechanism. [0003] The cross-scale precision motion technology with nanometer-level motion resolution and millimeter-level motion stroke is the key technology in the field of micro-drives, and has been applied to many important scientific and engineering fields. Compared with other types of cross-scale motion driving methods, stick-slip driving has simple driving principle, convenience, and simple control, and has the advantages of high resolution, large range of motion, simple structure, precise positioning, and easy miniaturization. Principle equipment is one of the most widely used cross-scale driving equipm...

AI Technical Summary

Problems solved by technology

At present, according to the different pre-tightening structures and adjustment methods of friction force, stick-slip drive cross-scale precision motion platforms are mainly divided into mechanical tolerance matching type stick-slip drive cross-scale precision motion platforms, permanent magnet preloaded stick-slip drive cross-scale precision motion platforms Platforms and upper and lower spring preloaded stick-slip drive cross-scale precision motion platforms, etc. Although these stick-slip drive cross-scale precision motion platforms are different in the friction preload structure and adjustment methods, the friction preload structure and adjustment The setting of the methods is too complicated, which will limit the friction adjustment, and at the same time, these schemes are not affected by the load change

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