Upper part pretightening stick-slip driving multi-scale precision motion platform

Abstract

The invention discloses an upper part pretightening stick-slip driving multi-scale precision motion platform, comprising a base, a sliding device, guide rails, a friction vibrator, and a vibrator driving source. The guide rails are installed on two sides of the base. The friction vibrator is installed on the base and is a flexible hinge mechanism. The sliding device comprises a sliding block and a sliding table. The sliding table is installed on the friction vibrator through the guiding rails. The sliding block is installed on the sliding table through a pretightening force adjusting structure, and the bottom of the sliding block contacts with the friction vibrator to generate friction forces. The pretightening force adjusting structure comprises adjusting bolts and pressure springs providing pretightening forces. The vibrator driving source is arranged between the base and the friction vibrator, so as to provide driving forces for the friction vibrator. Adjusting methods of pretightening forces of a motion platform are greatly simplified, and the platform is beneficial for processing and assembling, so as to effectively improve output performance of a stick-slip driving multi-scale precision motion platform.

Description

technical field [0001] The invention belongs to the technical field of precision motion, and in particular relates to an upper pre-tightened stick-slip driving cross-scale precision motion platform. Background technique [0002] The cross-scale precision motion technology with nanometer-level motion resolution and millimeter-level motion stroke is the key technology in the field of micro-drives, and has been applied to many important scientific and engineering fields. Compared with other types of cross-scale motion driving methods, stick-slip driving has simple driving principle, convenience, and simple control, and has the advantages of high resolution, large range of motion, simple structure, precise positioning, and easy miniaturization. Principle equipment is one of the most widely used cross-scale driving equipment at present. The working principle of the stick-slip drive is mainly based on the friction force as the driving source, using the difference between the dyna...

AI Technical Summary

Problems solved by technology

For the upper and lower spring preloaded stick-slip drive cross-scale precision motion platform, the related public technology has the publication number or patent number of WO2009043421A1, US6940210B2, US7579752B2, US20080148589A1 and other patents. Its working principle is mainly to divide the motion platform into upper and lower parts. The tension spring is used to adjust the friction force between the upper and lower parts and the friction vibrator. The tension spring adjusts its length through the thread structure, so as to realize the adjustment of the preload. Its guidance is realized by the diamond-shaped friction surface. The friction preload The adjustment range is small, and it is difficult to adapt to small differences in the friction interface

[0004] Although the above three kinds of stick-slip drive cross-scale precision motion platforms are different in the pre-tightening structure and adjustment method of friction force, the setting of the pre-tightening structure and adjustment method of friction force is too complicated, which will make the adjustment of friction force At the same time, these solutions all require high processing accuracy of the friction interface, which leads to high processing and assembly accuracy requirements for the stick-slip drive platform, which ultimately affects the motion accuracy and consistency of the cross-scale precision motion platform

Therefore, these solutions have many problems such as complex process and high cost when ensuring the mass production of stick-slip drive cross-scale motion platforms.

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