Adjustable pre-tightening stick-slip driving positioning platform based on flexible hinge

Abstract

The invention discloses an adjustable pre-tightening type stick-slip driving positioning platform based on flexible hinges. The adjustable pre-tightening type stick-slip driving positioning platform comprises a pedestal, a friction vibrator installed on the pedestal, a vibrator driving source installed between the pedestal and the friction vibrator, and a sliding table arranged on the upper portion of the friction vibrator. The friction vibrator comprises the transmission flexible hinge, an inertia mass block and a boss. The upper portion of the boss makes direct contact with the sliding table, and a pre-tightening force adjusting mechanism used for adjusting the pre-tightening force between the boss and the sliding table is arranged below the boss. The pre-tightening force adjusting mechanism comprises the pre-tightening flexible hinge and a pre-tightening adjusting bolt, the pre-tightening flexible hinge is located in the friction vibrator, the pre-tightening flexible hinge deforms under the action of the pre-tightening adjusting bolt, and thus the pre-tightening force between the boss and the sliding table is adjusted.

Description

technical field [0001] The invention relates to the technical field of micro-drive precision positioning, in particular to an adjustable pre-tightening stick-slip drive positioning platform based on a flexible hinge. Background technique [0002] With the development of nanoscience, new nanomaterials and nanostructures have been gradually explored and discovered, and have shown very broad application prospects. Nanotechnology is one of the basic means for human beings to explore, understand, transform and utilize the microcosm, among which nanomanipulation is an important content of nanotechnology. As one of the key technologies in the microscopic field, the development level of micro-positioning technology directly affects the development level of microscopic field technology, and its importance is self-evident. At present, in bioengineering, polymer manipulation, minimally invasive surgery, scanning probe microscope (SPM), atomic force microscope (AFM), scanning electron ...

AI Technical Summary

Problems solved by technology

For the upper and lower spring preloaded stick-slip drive cross-scale precision sliding table, the related public technology has the publication number or patent number of WO2009043421A1, US6940210B2, US7579752B2, US20080148589A1 and other patents. Its working principle is mainly to divide the sliding table into upper and lower parts. The tension spring is used to adjust the friction force between the upper and lower parts and the friction vibrator. The tension spring adjusts its length through the thread structure, so as to realize the adjustment of the preload. Its guidance is realized by the diamond-shaped friction surface. The friction preload The adjustment range is small, and it is difficult to adapt to small differences in the friction interface

[0005] Although the above three kinds of stick-slip drive cross-scale precision slide tables are different in the pre-tightening structure and adjustment method of friction force, the setting of the pre-tightening structure and adjustment method of friction force is too complicated, which will make the adjustment of friction force At the same time, these solutions all require high processing accuracy of the friction interface, which leads to high processing and assembly accuracy requirements for the stick-slip drive platform, and ultimately affects the motion accuracy and consistency of the cross-scale precision sliding table

Therefore, these solutions have many problems such as complex process and high cost when ensuring the mass production of stick-slip drive cross-scale sliding tables.

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