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Detection device and detection method of off-axis parabolic mirror surface shape precision

An off-axis parabolic mirror and off-axis parabolic surface technology, applied in the field of optical detection, can solve the problems of limited plane mirror size, surface shape accuracy that cannot be obtained by a profiler, and off-axis parabolic mirror surface accuracy detection devices and methods. The effect of expanding the measurement range and fast and accurate measurement

Active Publication Date: 2015-12-02
SHANGHAI MODERN ADVANCED ULTRA PRECISION MFG CENT
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Problems solved by technology

[0004] However, there are still many problems and deficiencies in the application of optical testing instruments and technologies. For example, the surface shape accuracy of the entire surface cannot be obtained by using a profiler, and the measurement by a plane mirror is limited by the size of the plane mirror.
[0005] At present, there is no detection device and method for the accuracy of the off-axis parabolic mirror surface

Method used

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  • Detection device and detection method of off-axis parabolic mirror surface shape precision
  • Detection device and detection method of off-axis parabolic mirror surface shape precision
  • Detection device and detection method of off-axis parabolic mirror surface shape precision

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Embodiment Construction

[0046] Below in conjunction with specific embodiment, further illustrate the present invention. It should be understood that these examples are only used to illustrate the present invention and are not intended to limit the scope of the present invention. In addition, it should be understood that after reading the teachings of the present invention, those skilled in the art can make various changes or modifications to the present invention, and these equivalent forms also fall within the scope defined by the appended claims of the present application.

[0047] The off-axis parabolic mirror 3 to be tested in this embodiment is the metal to be tested, and other off-axis parabolic mirrors that can be processed by SPDT, such as infrared materials or plastics, can be applied to the present invention.

[0048] see Figure 1-6 , a detection device for off-axis parabolic mirror shape accuracy, comprising a Fizeau interferometer 1, a standard spherical mirror 2, an auxiliary concave s...

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Abstract

The invention relates to a detection device of off-axis parabolic mirror surface shape precision. The detection device is composed of a Fizeau interferometer, a standard spherical mirror, an auxiliary concave spherical column, a base disc, a five-dimensional adjusting frame, a standard plane mirror, a two-dimensional adjusting frame, a supporting fixing bottom plate, a first base and a second base; the Fizeau interferometer is provided with the standard spherical mirror; the standard spherical mirror is a light beam output window of the Fizeau interferometer; the base disc is located below the Fizeau interferometer; the base disc is provided with an off-axis parabolic mirror to be detected and the auxiliary concave spherical column; the base disc is located at the top surface of the five-dimensional adjusting frame; the standard plane mirror is arranged at the bottom surface of the two-dimensional adjusting frame; and the two-dimensional adjusting frame is located above the off-axis parabolic mirror to be detected. With the detection device of the off-axis parabolic mirror surface shape precision of the invention adopted, the surface shape precision of the off-axis parabolic mirror can be accurately and quickly detected.

Description

technical field [0001] The invention relates to the technical field of optical detection, in particular to a detection device and a detection method for the shape accuracy of an off-axis parabolic mirror based on a Fizeau interferometer. Background technique [0002] Traditional inspection methods and techniques for optical components have been used for decades. Optical inspection involves the material, caliber, and type of the tested component, as well as testing technology, instruments and equipment. There are many types of components to be tested, including parallel flat plates, spherical surfaces, aspheric surfaces, free-form surfaces, diffraction gratings, cone mirrors, cylindrical lenses, etc. Among the aspheric surfaces, there are special aspheric surfaces such as paraboloids, ellipsoids, hyperboloids and other other aspheric surfaces. The main instruments commonly used in optical inspection can be divided into interferometers, surface profilers, MTF testers, precis...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/24
Inventor 施丽敏
Owner SHANGHAI MODERN ADVANCED ULTRA PRECISION MFG CENT
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