Improved scanning method for scanning probe microscope

Abstract

The invention discloses an improved scanning method for a scanning probe microscope. In the method, in a forward scanning process which requires signal collection by the scanning probe microscope, interacting information of a probe to a sample is collected, and in a return scanning process which does not require signal collection, an improved return blank scanning control method is employed so that interaction between the probe and the sample is weakened or the probe and the sample are completely separated from each other. In the return scanning process, which does not require signal collection, of the scanning probe microscope, the interaction between the probe and the sample is weakened or the probe and the sample are completely separated from each other, so that invalid abrasion or consumption is effectively reduced or eliminated during the return scanning process. The method increases service life of a probe and also reduces use cost of a microscopy. The method can be widely used in the technical field of microscopy.

Description

technical field [0001] The invention relates to the field of microscopic technology, in particular to an improved scanning method of scanning probe microscope. Background technique [0002] Since the appearance of the scanning tunneling microscope STM in 1982, a series of new microscopes with similar working principles have been developed successively, including atomic force microscope AFM, lateral force microscope LFM, magnetic force microscope MFM, electrostatic force microscope EFM, near-field optical microscope SNOM, Piezoelectric force microscope PFM, scanning probe acoustic microscope SPAM, etc., because they all use probes to scan the sample to be tested, and need to detect the interaction between the probe and the sample during the scanning process (such as the sample-probe The interaction force, etc.) to obtain the relevant properties of the sample (such as morphology, friction, magnetic domain structure, etc.), so they are collectively referred to as scanning probe...

AI Technical Summary

Problems solved by technology

However, when the scanning probe microscope probe returns to the scanning line, it still interacts with the sample, resulting in ineffective wear and tear, which affects the service life of the probe and increases the cost of the instrument

[0007] To sum up, during the detection process of the current scanning probe microscope, its control system can only collect signals in one direction of the two directions of round-trip scanning for imaging, while the other direction does not need to collect signals, but its probe still Interact with the sample, resulting in ineffective wear, which affects the service life of the probe and increases the cost of the microscope

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