Improved scanning method for scanning probe microscope

A technology of scanning probes and scanning methods, which is applied in the direction of material analysis, measuring devices, and instruments using wave/particle radiation, which can solve problems such as wear, increase the cost of instrument use, and affect the service life of probes, so as to eliminate invalid wear Or loss, increase the service life, reduce the effect of using cost

CN105241908AInactive Publication Date: 2016-01-13BEING NANO INSTR LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Publication Date
2016-01-13
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses an improved scanning method for a scanning probe microscope. In the method, in a forward scanning process which requires signal collection by the scanning probe microscope, interacting information of a probe to a sample is collected, and in a return scanning process which does not require signal collection, an improved return blank scanning control method is employed so that interaction between the probe and the sample is weakened or the probe and the sample are completely separated from each other. In the return scanning process, which does not require signal collection, of the scanning probe microscope, the interaction between the probe and the sample is weakened or the probe and the sample are completely separated from each other, so that invalid abrasion or consumption is effectively reduced or eliminated during the return scanning process. The method increases service life of a probe and also reduces use cost of a microscopy. The method can be widely used in the technical field of microscopy.
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Description

technical field

[0001] The invention relates to the field of microscopic technology, in particular to an improved scanning method of scanning probe microscope. Background technique

[0002] Since the appearance of the scanning tunneling microscope STM in 1982, a series of new microscopes with similar working principles have been developed successively, including atomic force microscope AFM, lateral force microscope LFM, magnetic force microscope MFM, electrostatic force microscope EFM, near-field optical microscope SNOM, Piezoelectric force microscope PFM, scanning probe acoustic microscope SPAM, etc., because they all use probes to scan the sample to be tested, and need to detect the interaction between the probe and the sample during the scanning process (such as the sample-probe The interaction force, etc.) to obtain the relevant properties of the sample (such as morphology, friction, magnetic domain structure, etc.), so they are collectively referred to as scanning probe...

Examples

Embodiment 1

[0082] In the scanning probe microscope of this embodiment, when the scanning probe microscope detects the imaging, the probe is controlled to be separated from the sample in the return scanning path of the probe, and then the probe is controlled to be in contact with the sample after returning to the starting point, and the normal operation of the next line is started. to scan, such as Figure 5 Shown (the solid line is the forward scanning trajectory, and the dotted line is the return scanning trajectory).

[0083] from Figure 5 It can be seen that during detection and imaging, the scanning probe microscope separates the probe from the sample during a round-trip scanning process, which effectively eliminates the useless wear or loss of the needle tip, reduces the probability of the needle tip being contaminated by the sample, and improves the detection efficiency. needle life.

[0084] In this embodiment, an atomic force microscope is taken as an example to describe the i...