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production system

A production system and product technology, applied in the general control system, control/regulation system, comprehensive factory control, etc., can solve the problem of complex change operation and achieve the effect of easy change operation

Active Publication Date: 2018-03-30
SANKYO SEIKI MFG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, in this production system, the change operation becomes complicated when a new type of product is produced and when the processing conditions of the object to be processed are changed.

Method used

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Embodiment Construction

[0032] Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[0033] (Structure of production system)

[0034] figure 1 It is a block diagram for explaining the schematic structure of the production system 1 which concerns on embodiment of this invention. figure 2 For description stored in figure 1 A diagram of the correspondence table T of the programmable logic controller 12 shown.

[0035] The production system 1 of the present embodiment is a system for producing various products by performing predetermined processing on objects to be processed. Specifically, the production system 1 of this embodiment is a system for performing predetermined processing on a substrate 2 as an object to be processed to produce various types of semiconductors as products. The production system 1 has: a bracket 3 for storing a plurality of substrates 2; a plurality of processing devices 4 to 7 for performing prescribed processing on the subst...

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Abstract

A production system processes a processing object for producing a plurality of types of products. The production system is capable of easily performing changing operation when producing new types of products. In the production system 1, a plurality of main technology numbers are stored in a host 8; a processing condition of each processor 4-7 with respect to the processing object 2 is that a plurality of device technologies are corresponding to device technology number for identifying the plurality of device technologies and are stored in each processor 4-7; a correspondence table is stored in a relay computer 9, and the correspondence table specifies the device technology numbers of the processors 4-7 respectively corresponding to the plurality of main technology numbers. The processors 4-7 send the main technology numbers to the relay computer 9, receive the device technology numbers corresponding to the main technology numbers from the relay computer 9, and utilize device technologies corresponding to the received device technology numbers the process the e processing object 2.

Description

technical field [0001] The present invention relates to a production system for producing a plurality of products by performing predetermined processing on objects to be processed by a plurality of processing devices. Background technique [0002] Conventionally, a production system is known in which products such as semiconductors are produced by subjecting an object to be processed to a predetermined process (for example, refer to Patent Document 1). The production system described in Patent Document 1 includes a pallet for storing objects to be processed and a plurality of manufacturing devices for processing the objects to be processed. The tray has an identification code tray in which information corresponding to the manufactured product is stored. Each manufacturing device has an identification code reading and writing device, and the identification code reading and writing device reads and updates the information stored in the identification code bracket, and stores ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G05B19/05
CPCG05B19/05G05B2219/15078Y02P90/02
Inventor 仓田茂
Owner SANKYO SEIKI MFG CO LTD
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