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Three-dimensional fine movement device

A micro-movement device and three-dimensional technology, which is applied to measuring devices, scanning probe microscopy, instruments, etc., can solve problems such as finding the correct position of piezoelectric elements

Active Publication Date: 2016-02-10
HITACHI HIGH TECH SCI CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, since the operating characteristics of the piezoelectric element have hysteresis or creep, it is difficult to obtain the correct position of the piezoelectric element from the applied voltage.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0037] Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[0038] figure 1 is a block diagram of a three-dimensional micro-motion device (scanning probe microscope) 200A according to the first embodiment of the present invention, figure 2 is along figure 1 Sectional view of line A-A.

[0039] exist figure 1 Among them, the scanning probe microscope 200A is provided with: a cantilever 1 holding a probe at the tip, a cantilever mounting part (slope block) 101, a cylindrical scanner 111, and a frame constituting a frame supporting each component of the scanning probe microscope. The base part 13, the non-contact sensor 130, the detection surface 132 for receiving the detection signal from the non-contact sensor 130, the three-dimensional coarse motion part 122, the sample stage 102 provided on the three-dimensional coarse motion part 122, and the overall control A probe microscope controller 24, a control unit (computer) 4...

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Abstract

The invention provides a three-dimensional fine movement device which utilizes a movement amount detection unit fixed on a base member or coarse movement unit which is relatively motionless relative to fine movement of a moving body to directly measure the three-dimensional position of a fixation member to which a moving body such as a cantilever is fixed, and thus the position of the fixation member and even the moving body can be easily and correctly measured. The three-dimensional fine movement device includes a moving body, a fixation member to which the moving body is fixed, a three-dimensional fine movement unit, to which the fixation member is fixed, and which allows for three-dimensional fine movement of the moving body with the fixation member interposed therebetween, a base member to which the three-dimensional fine movement unit is fixed, and movement amount detecting means that is fixed to the base member to detect a movement amount of the fixation member.

Description

technical field [0001] The present invention relates to a three-dimensional micro-motion device such as a scanning probe microscope having a mechanism for driving a stage. Background technique [0002] The scanning probe microscope makes the probe mounted on the tip of the cantilever approach or contact the surface of the sample to measure the surface shape of the sample. As the measurement mode of the scanning probe microscope, (1) the contact mode in which the interatomic force between the probe and the sample is kept constant to measure the surface shape of the sample; The method of forcibly vibrating near the resonant frequency and measuring the shape of the sample by using the fact that the amplitude of the probe is attenuated by intermittent contact between the two when the probe is brought close to the sample (hereinafter referred to as "Dynamic mode (DFM measurement mode)"); (3) The cantilever is forced to vibrate near the resonance frequency by using a piezoelectri...

Claims

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Application Information

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IPC IPC(8): G05D3/12
CPCG01Q10/02G01Q10/04G01Q20/00G01Q20/02G01Q70/04
Inventor 繁野雅次渡边和俊渡边将史
Owner HITACHI HIGH TECH SCI CORP