Aspheric vertex curvature radius measurement method in nonzero digit interference detection system
A technology of interference detection and radius of curvature, applied in measuring devices, instruments, optical devices, etc., can solve the problem that the absolute positioning of the measured surface cannot be directly applied to the aspheric detection system.
Active Publication Date: 2016-02-24
ZHEJIANG UNIV
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Therefore, in the traditional method of measuring the radius of curvature of the vertex, the method of achieving absolute positioning of the measured surface through cat's eye, confocal, or other special positions cannot be directly applied to most aspheric surface detection systems
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[0053] An example of the application of the present invention to the measurement of the radius of curvature of an aspheric vertex ball in a non-zero interferometric system is described as follows.
[0054] figure 1 It is a diagram of a measurement device for the radius of curvature of an aspheric vertex in a non-zero interferometric system. The laser wavelength is λ=632.8nm. The thin beam emitted by the laser L1 is expanded into a wide beam of parallel light by the collimator beam expander system L2, and the parallel light travels forward to the beam splitter L3 and is divided into two beams. One path propagates forward to the reference plane mirror L4 and then returns to the original path as the reference wave; the other path propagates forward to the partial zero mirror L8 and then converges and then diverges. The divergent light is basically perpendicular to the measured aspheric surface L9 and then returns, passing through the partial zero position again. The mirror L8 en...
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The invention discloses an aspheric vertex curvature radius measurement method in a nonzero digit interference detection system. Wavefront aberration coefficients which are detected at different positions of the aspheric surface along the optical axis are utilized, reverse optimization of light tracing software is combined, and the initial positioning position and the vertex curvature radius of the aspheric surface are therefore solved. An accurate positioning process of a cat eye and a parfocal point in a traditional zero digit detection method is avoided, and the problem that the curvature radius error and the shape of a detected surface influence each other and cannot be accurately determined when the detected surface is positioned in nonzero digit interference detection is solved; and the measurement method is directly suitable for a nonzero digit detection system, the complex procedure that the surface error and the vertex curvature radius are measured respectively is avoided, the method is not dependent on the aspheric absolute positioning precision, and light iteration tracing replaces the complex calculation process.
Description
technical field [0001] The invention relates to a method for measuring the radius of curvature of an apex ball of an aspheric surface in a non-zero position interference detection system. Background technique [0002] At present, the optical aspheric surface is widely used, and its surface shape requirements are increasing day by day, and its surface shape detection accuracy has always been an important factor restricting its application. The interferometric detection method has gradually become the mainstream optical aspheric surface error detection method due to its non-contact characteristics, and the high-precision measurement of the curvature radius of the apex of the aspheric surface has always been an important prerequisite for ensuring the measurement accuracy of the surface error. The traditional spherical curvature radius measurement method measures the curvature radius by using the spherical reference wave to discriminate the relative distance of the zero position...
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IPC IPC(8): G01B11/255
Inventor 刘东杨甬英张磊师途种诗尧
Owner ZHEJIANG UNIV