Photoresist barrel with temperature monitoring function

A photoresist and functional technology, applied in the field of photoresist barrels with temperature monitoring function, can solve the problems of inaccurate and wasteful judgment methods, and achieve the effect of precise monitoring and good sealing effect

Inactive Publication Date: 2016-02-24
刘幸
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This judgment method is not accurate enough, especially for newly developed photoresist materials, it takes a lot of experiments to get a relatively accurate thawing time, which will cause a lot of waste in the experimental stage

Method used

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  • Photoresist barrel with temperature monitoring function
  • Photoresist barrel with temperature monitoring function

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0018] like figure 1 As shown, a photoresist barrel with a monitoring function in this embodiment includes a barrel cover 1, a barrel mouth 2, a barrel wall 3, a barrel bottom 4, and a drainage tube 5; an LED display screen is arranged on the outside of the barrel cover 1 6 and a buzzer 7, the inside of the bung is provided with a first connector 8, the LED display 6 and the buzzer 7 are connected to the first connector 8 through a line hidden in the bung, and the top of the drainage tube 5 is covered There is a second connector 9; as figure 2 As shown, the first connector of this embodiment is a probe-type plug-in piece, the second connector is a socket slot that matches the probe of the first connector, and the second connector is outside the mouth of the barrel; drainage The middle part of the tube 5 is provided with a temperature sensor 10, and the temperature sensor 10 is connected to the second connector 9 through a circuit arranged on the outer wall of the drainage tu...

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PUM

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Abstract

The invention provides a photoresist barrel with a temperature monitoring function, comprising a barrel cover, a barrel mouth, a barrel wall, a barrel bottom, and a drainage tube arranged at the barrel mouth. The photoresist barrel is characterized in that an LED display and a buzzer are arranged on the outer side of the barrel cover; a first connector is arranged on the inner side of the barrel cover; the LED display and the buzzer are connected with the first connector through lines; a second connector in matching connection with the first connector is arranged on the top of the drainage tube; and a temperature sensor is arranged on the outer wall of the drainage tube, and the temperature sensor is connected with the second connector through a line. Whether thawed photoresist can be used in production can be judged accurately by monitoring the temperature of photoresist in the barrel in real time.

Description

technical field [0001] The invention relates to a photoresist barrel, in particular to a photoresist barrel with a temperature monitoring function. Background technique [0002] Photoresist is a frequently used raw material in the semiconductor industry. Due to its special composition, it is stored in a refrigerator at about 5 degrees Celsius in the factory. The photoresist stored in the refrigerator needs to be thawed to a room temperature of 23 degrees Celsius in advance before it can be used. . At present, whether the photoresist is fully thawed is judged based on empirical time (placed at room temperature for more than 24 hours), or calculated by measuring the temperature of the outer wall of the photoresist barrel after a large number of experimental data. This judgment method is not accurate enough, especially for newly developed photoresist materials, it needs a lot of experiments to get a relatively accurate thawing time, which will cause a lot of waste in the exper...

Claims

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Application Information

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IPC IPC(8): G01K13/00G01K1/02
Inventor 刘幸
Owner 刘幸
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