Rotary-type spherical interference splicing measuring device and regulation method thereof
A measurement device and adjustment method technology, applied in the field of optical detection, can solve the problems of high cost, difficulty in installation and adjustment of the measured spherical surface, and limited development, and achieve the effect of low cost
Inactive Publication Date: 2016-03-02
SHANGHAI UNIV
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Problems solved by technology
The existing large-aperture commercial interferometers are expensive and have high requirements for the detection environment. The use of small-aperture interferometers can reduce costs by splicing methods
However, it is difficult to install and adjust the measured spherical surface, which limits the development of this method.
[0003] For the interference splicing measurement of large-diameter optical spheres, after consulting domestic and foreign literature, high-precision moving and tilting platforms are used to adjust the measured part, which is costly, and the movement and tilting are used to realize the rotation of the measured sphere. There are errors in principle and operation
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[0020] The embodiments of the present invention will be further described below in conjunction with the accompanying drawings.
[0021] Such as figure 1 As shown, a rotating spherical surface interference splicing measurement device includes a computer 1, an interferometer 2, an air-floating platform 3, a spherical surface to be measured 4, and a device under test adjustment mechanism 5. The interferometer 2 and the device under test adjustment mechanism 5 Placed on the air flotation platform 3, the measured spherical surface 4 is installed on the measured part adjustment mechanism 5, the computer 1 is connected to the interferometer 2, processes the measurement data collected by the interferometer 2, and obtains the error information of the measured spherical surface 4 ; The measured piece adjustment mechanism 5 is composed of seven degrees of freedom adjustment mechanism, i.e. five linear moving platforms, and two rotating platforms, wherein five linear moving platforms are ...
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The present invention relates to a rotary-type spherical interference splicing measuring device. The rotary-type spherical interference splicing measuring device comprises a computer, an interferometer, an air-floating platform, a measured sphere and a regulation mechanism of a measured piece. The interferometer and the regulation mechanism of the measured piece are installed on the air-floating platform; the measured sphere is installed on the regulation mechanism of the measured piece; the computer is connected with the interferometer to process measurement data acquired by the interferometer and obtain error information of the measured sphere; the regulation mechanism of the measured piece is composed of a regulation mechanism with seven degrees of freedom, namely five linear mobile platforms and two rotatable platforms, the five linear mobile platforms are configured to regulate the position of the measured sphere to allow the focus of a spherical wave emitted by the interferometer to coincide with the centre of the measured sphere, and the two rotatable platforms are configured to rotate the measured sphere to realize the splicing measurement. According to the invention, the rotary-type spherical interference splicing measuring device is able to reduce the regulation error of a measured sphere, improve the measurement precision and obtain the overall surface shape of the measured sphere through interference splicing.
Description
technical field [0001] The invention discloses a large-caliber spherical surface error measurement and method, in particular to a rotating spherical surface interference splicing measurement device and an adjustment method thereof, which belong to the technical field of optical detection. Background technique [0002] With the development of science and technology and industry, the precision requirements for large-diameter optical parts are getting higher and higher. The existing large-aperture commercial interferometers are expensive and have high requirements for the detection environment. The use of small-aperture interferometers and splicing methods can reduce costs. However, it is difficult to install and adjust the measured spherical surface, which limits the development of this method. [0003] For the interference splicing measurement of large-diameter optical spheres, after consulting domestic and foreign literature, high-precision moving and tilting platforms are ...
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IPC IPC(8): G01B11/24
Inventor 于瀛洁宋琨鹏汪清泉齐特郭红卫
Owner SHANGHAI UNIV