Double-angle charge split type anode
A technology of charge division and anode, which is applied in the direction of circuits, discharge tubes, electrical components, etc., can solve the problem of large capacitance between position-sensitive anodes, and achieve the effects of stable imaging, reduced influence, and high anode resolution
Inactive Publication Date: 2016-04-06
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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[0003] In order to solve the problem of large inter-electrode capacitance of the existing position-sensitive anode during ring detection, the present invention proposes a double-angle charge-splitting anode. greatly reduced
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[0012] Such as figure 2 As shown, the double-angle charge-splitting anode is plated with a 0.003mm copper film on a 2mm thick quartz substrate, and is formed by photolithography on the surface of the copper film using laser processing technology. The effective collection area of the anode is Φ15-50 mm, and the width of each insulating channel is about 30 μm. The left electrode 1, the right electrode 2 and the compensation electrode 3 are electrodes formed by photolithography, and the center of the circle is O 1 , with radius r 1 The first insulating trench 5 and the center of the circle is O 2 , radius r 2 The left electrode 1 is formed between the second insulating channel 6; the center of the circle is O 2 , radius r 2 The second insulating channel 6 and the center of the circle is O 3 , radius r 3 The compensation electrode 3 is formed between the third insulating trench 7; the center of the circle is O 3 , radius r 3 The third insulating channel 7 and the cente...
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The invention relates to a double-angle charge split type anode and belongs to the physical particle detection technical field. The objective of the invention is to solve the problem of large interelectrode capacitances of an existing position sensitive anode in loop detection. An insulating substrate is plated with a metal layer; laser photo-etching is performed on the metal layer, so that the metal layer can be divided into two portions through a division insulating channel, wherein the two portions are in longitudinal symmetry, and each portion is composed of a plurality of periodic structures, wherein each periodic structure includes a leftward electrode, a compensation electrode and a rightward electrode which are distributed from outside to inside sequentially, the width of each periodic structure being p; the leftward electrodes are located between first insulating channels and second insulating channels; the compensation electrodes are arranged between second insulating channels and third insulating channels; and the rightward electrodes are arranged between the third insulating channels and fourth insulating channels; each insulating channel is circular arc-shaped; the center of each first insulating channel is O1, and the radius of the first insulating channel is r1; the center of each second insulating channel is O2, and the radius of the second insulating channel is r2; the center of each third insulating channel is O3, and the radius of the third insulating channel is r3; and the center of each fourth insulating channel is O4, and the radius of the fourth insulating channel is r4.
Description
technical field [0001] The invention relates to a charge-splitting anode for determining and detecting the position of incident light or electrons, in particular to the design of a charge-splitting anode in a photon counting imaging detector, and belongs to the technical field of physical particle detection. Background technique [0002] In physics particle detection technology, photon counting imaging detectors are widely used. Among them, the position-sensitive anode, as an important part of the detector, plays a key role in imaging. Aiming at the experiment where the detection area is circular, Yang Jing et al. proposed a two-dimensional position-sensitive detector with a polar coordinate readout double-wedge strip anode (see patent application number 201410360618.9 of Yang Jing, Wang Fan, etc.), which can Direct measurements of particle-to-center distances and polar angles. The anode it uses is improved on the basis of the wedge anode (see R.W.VanBoeyenandJ.F.Williams,...
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IPC IPC(8): H01J47/00
CPCH01J47/001
Inventor 尼启良赵爱荣
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI