Dual angle charge split anode
A technology of charge division and anode, which is applied in the direction of circuits, discharge tubes, electrical components, etc., can solve the problem of large capacitance between position-sensitive anodes, and achieve the effects of stable imaging, reduced influence, and high anode resolution
Inactive Publication Date: 2017-07-14
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology
[0003] In order to solve the problem of large inter-electrode capacitance of the existing position-sensitive anode during ring detection, the present invention proposes a double-angle charge-splitting anode. greatly reduced
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[0012] Such as figure 2 As shown, the double-angle charge-splitting anode is plated with a 0.003mm copper film on a 2mm thick quartz substrate, and is formed by photolithography on the surface of the copper film using laser processing technology. The effective collection area of the anode is Φ15-50 mm, and the width of each insulating channel is about 30 μm. The left electrode 1, the right electrode 2 and the compensation electrode 3 are electrodes formed by photolithography, and the center of the circle is O 1 , with radius r 1 The first insulating trench 5 and the center of the circle is O 2 , radius r 2 The left electrode 1 is formed between the second insulating channel 6; the center of the circle is O 2 , radius r 2 The second insulating channel 6 and the center of the circle is O 3 , radius r 3 The compensation electrode 3 is formed between the third insulating trench 7; the center of the circle is O 3 , radius r 3 The third insulating channel 7 and the cente...
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The double-angle charge-splitting anode belongs to the technical field of physical particle detection. In order to solve the problem of large inter-electrode capacitance of the existing position-sensitive anode during ring detection, a metal layer is plated on the insulating substrate, and laser lithography is performed on the metal layer. The split insulation channel is divided into two parts symmetrically distributed up and down, each part is composed of multiple periodic structures, the width of the periodic structure is p, and each period is the left electrode, the compensation electrode and the right electrode in turn from the outside to the inside; the first insulation There is a left electrode between the channel and the second insulating channel, a compensation electrode between the second insulating channel and the third insulating channel, and a right electrode between the third insulating channel and the fourth insulating channel; Each insulating trench is arc-shaped, the center of the first insulating trench is O1, and the radius is r1; the center of the second insulating trench is O2, and the radius is r2; the center of the third insulating trench is O3, and the radius is r2 r3; the center of the fourth insulating trench is O4, and the radius is r4.
Description
technical field [0001] The invention relates to a charge-splitting anode for determining and detecting the position of incident light or electrons, in particular to the design of a charge-splitting anode in a photon counting imaging detector, and belongs to the technical field of physical particle detection. Background technique [0002] In physics particle detection technology, photon counting imaging detectors are widely used. Among them, the position-sensitive anode, as an important part of the detector, plays a key role in imaging. Aiming at the experiment where the detection area is circular, Yang Jing et al. proposed a two-dimensional position-sensitive detector with a polar coordinate readout double-wedge strip anode (see patent application number 201410360618.9 of Yang Jing, Wang Fan, etc.), which can Direct measurements of particle-to-center distances and polar angles. The anode it uses is improved on the basis of the wedge anode (see R.W.VanBoeyen and J.F.William...
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IPC IPC(8): H01J47/00
CPCH01J47/001
Inventor 尼启良赵爱荣
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI