Rapidly-responsive humidity sensor and manufacturing method thereof

Abstract

The invention discloses a rapidly-responsive humidity sensor and a manufacturing method thereof, belonging to the technical field of manufacturing process for semiconductor integrated circuits. The rapidly-responsive humidity sensor comprises a substrate, metal interdigital electrode layers and a humidity-sensitive material layer, wherein the humidity-sensitive material layer is distributed among the metal interdigital electrode layers and on the upper surfaces of the metal interdigital electrode layers and provided with at least one groove used for increasing the surface area of the humidity-sensitive material layer. According to the invention, a part of a humidity-sensitive material is removed compared with conventional manufacturing processes for interdigital electrode type humidity sensors, a single and a plurality of grooves are formed in the humidity-sensitive material layer, so more surface areas of the humidity-sensitive material are exposed in a to-be-measured environment; and thus, the motion path of water molecules can be effectively shortened, so the response speed of the humidity sensor is increased. The method does not increase manufacturing cost for the sensor, is simple, substantially improves the performance of the humidity sensor and is completely compatible with traditional CMOS processes.

Description

technical field [0001] The invention belongs to the technical field of semiconductor integrated circuit manufacturing technology, and relates to a fast-response humidity sensor and a manufacturing method thereof. Background technique [0002] Humidity, usually refers to the content of water vapor in the air, which is used to reflect the dryness and humidity of the atmosphere. Human daily life, industrial and agricultural production activities, and the survival and growth of animals and plants are all closely related to the humidity of the surrounding environment. Humidity measurement requires the use of humidity sensors, which are manufactured on the basis of humidity-sensitive functional materials that can produce physical effects or chemical reactions related to humidity, and have the function of converting humidity physical quantities into electrical signals. [0003] Humidity sensors can be divided into telescopic type, evaporative type, dew point meter, electronic type...

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Problems solved by technology

[0007] In view of the above problems, in order to overcome the deficiencies in the prior art, the object of the present invention is to provide a humidity sensor with a fast response compatible with the CMOS process and a manufacturing method thereof, so as to solve the problem of slow response speed of the humidity sensor in the prior art

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