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Thermal sensitive layer gas sensor

A sensor and sensitive layer technology, applied in the field of molecular sensors, can solve the problems of fast sensor aging

Active Publication Date: 2018-10-09
UNIV DAIX MARSEILLE +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, it has been noted that the sensitive layer of this sensor ages faster than sensors made in other technologies

Method used

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  • Thermal sensitive layer gas sensor
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  • Thermal sensitive layer gas sensor

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Experimental program
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Embodiment Construction

[0020] The inventors have found that the sensitive layer of a small thermal sensor degrades mainly on the high voltage (Vh) side that powers the resistive track, especially when integrated circuit fabrication techniques are used to generate the sensor, Figure 1A shown in area D. The inventors attribute this effect to the electric field experienced by the sensitive layer. In fact, the supply voltage Vh of the resistive track can be quite high, as high as 5.7V, and in integrated circuit technology the distance between the resistive track and the conductive track of the electrode can be particularly small, so that on the side of the resistive track at the highest voltage A strong electric field is established at the intersection of each electrode and the resistive track. The first damage to the sensitive layer does occur at these lane intersections.

[0021] To avoid this degradation caused by the electric field, moving the resistive track away from the electrode does not actua...

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Abstract

The invention relates to a sensor with a thermally sensitive layer, comprising: an insulating substrate (10) carrying a sensitive layer (12); a complementary measuring electrode (E1, E2); and a heating element (14) in the form of a resistive track arranged on the substrate for uniform heating of the active area of ​​the sensitive layer. The resistive track (14') includes at least three power supply points at regular intervals exceeding the length of the resistive track, and supplies the first power supply voltage (0) to each even-numbered point, and supplies each odd-numbered point to Second supply voltage (Vh').

Description

technical field [0001] The invention relates to molecular sensors, in particular gas sensors operated with a thermosensitive layer. Background technique [0002] The sensitive layer of this type of sensor usually comprises a semiconducting oxide, the nature of which and the operating temperature are chosen according to the molecule to be detected. The resistivity of the sensitive layer varies depending on the concentration of molecules adsorbed by the oxide layer. [0003] Figure 1A and 1B A top view and a cross-section along axis AA of a conventional thermosensitive layer sensor is schematically shown, for example, as described in the following paper: "Development of Co GasSensing Based SnO Thin film" by I Dewa Putu Hermida et al., International Journal of Engineering & Technology IJET-IJENS Vol. 13 No:.01] and [George F. Fine et al. "Metal Oxide Semi-Conductor Gas Sensors in Environmental Monitoring", Sensors 2010, 10, 5469-5502]. [0004] The sensor comprises an insul...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N27/406G01N27/22H05B3/14G01N27/407
CPCG01N27/123G01N27/128G01N27/4067G01N27/4075G01N2027/222H05B3/20H05B2203/003H05B2203/006H05B2203/013H05B2203/037H05B2203/03G01N27/125
Inventor K·阿吉尔M·本达安V·M·莱捷 马丁尼
Owner UNIV DAIX MARSEILLE