A self-consistent microchannel manufacturing method and device based on surface tension

Abstract

The invention discloses a micro-channel manufacturing method and device based on surface tension self-consistency. The device comprises a cylinder body, a focusing device and a control system, wherein the cylinder body is used for containing Ga-In liquid alloy; the focusing device is arranged above the cylinder body and is used for spraying metal powder; a supporting platform capable of ascending and descending in the cylinder body is arranged in the cylinder body; an induction heating station is arranged above a liquid level of the Ga-In liquid alloy in the cylinder body; the focusing device is fixed on a mobile platform, and is driven by the mobile platform to move in a two-dimensional plane; and the control system is used for controlling the supporting platform to ascend or descend according to preset ascending and descending speed and controlling the mobile platform to move in the two-dimensional plane according to a preset motion track. In a manufacturing process, the focusing device is driven by the mobile platform, and can accurately move in the two-dimensional plane, and various tracks can be formed. Required motion tracks, namely cross section shapes, patterns and the like of micro-channels, are set through the control system, and the micro-channels which are in optional shapes can be machined conveniently and quickly through the focusing device.

Description

technical field [0001] The invention relates to the field of microchannel manufacturing and preparation, in particular to a microchannel manufacturing method based on self-consistent surface tension and a device thereof. Background technique [0002] There are many methods for manufacturing microchannels, such as photolithographic processing, melting drawing, softening drawing, femtosecond laser processing, injection molding, hot pressing, metal corrosion, LIGA and UV-LIGA. [1-3] . Among them, the photolithography processing method is mostly used in the manufacture of silicon microchannels; the fusion drawing method, softening drawing method and femtosecond laser processing method are mostly used in the manufacture of glass microchannels; the injection molding method and hot pressing method are often used in the fabrication of polymer microchannels. manufacture. Metal microchannels are commonly fabricated by metal corrosion method, LIGA method and UV-LIGA method. [0003]...

AI Technical Summary

Problems solved by technology

[0018] The purpose of the present invention is to overcome the shortcomings and deficiencies of the above-mentioned prior art, to provide a microchannel manufacturing method based on surface tension self-consistent and its device, to solve the problem that the microchannel of any shape cannot be processed in the existing metal microchannel manufacturing process. Technical issues such as nanoscale microchannels and the inability to obtain individual microchannel devices

Images