Integrated multifunctional ceramic packaging tube shell

A multi-functional ceramic package shell technology, which is applied in the direction of measuring devices, electric solid state devices, semiconductor devices, etc., can solve the problems of high complexity of traditional packaging process, not conforming to the development trend of the industry, and large volume of packaged devices. Good for volume, excellent mechanical shock resistance, and large metal area resistance

Active Publication Date: 2016-07-06
XINFOO SENSOR TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The problem with the traditional assembly method is that the assembly process of each independent component is different, some require spot welding, some brazing, and some require bonding welding, etc. The process temperature, time and equipment are also different, and the process conditions The repulsion and incompatibility between them will lead to high complexity of traditional packaging technology, difficult operation technology, poor production yield and low efficiency, which will eventually lead to high production cost; in addition, the final volume of packaged devices made by traditional packaging technology is large, Not in line with industry trends

Method used

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  • Integrated multifunctional ceramic packaging tube shell
  • Integrated multifunctional ceramic packaging tube shell

Examples

Experimental program
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Embodiment 1

[0032] Example 1: see image 3 and Figure 4 , an integrated multi-functional ceramic packaging package, comprising a ceramic package package 10, a getter module 20, a temperature control module 30 and a temperature measurement module 40, the getter module 20, the temperature measurement module 40 and a temperature control module The module 30 is integrated with the ceramic packaging package 10 .

[0033] Specifically, the getter module 20 includes a metal area 21 and a getter material layer 22. The metal area 21 is planar, and the metal material can be heated by resistance such as tungsten or molybdenum. By including but not limited to metal paste Material printing, electroplating or chemical deposition methods and other processing methods are directly grown on the inner surface of the ceramic package shell, preferably using a metal paste printing process; the getter material layer 22 can be obtained by including but not limited to sputtering, coating The metal area 21 is g...

Embodiment 2

[0041] Example 2: see Figure 5 and Figure 6 , the other parts are the same as in Embodiment 1, the difference is that: the metal region 21 is in the shape of a convex-concave wall, and the getter material layer 22 is grown on the metal region in the shape of a convex-concave wall. Compared with the planar metal area, the metal area in the shape of a convex-concave wall can increase the contact area of ​​the getter material layer, enhance the air-absorbing effect, and prolong the service life of the packaged device.

[0042] In the present invention, the integrated design of the getter module, the temperature control module, the temperature measurement module and the ceramic packaging shell can realize the functions of air suction, temperature control and temperature measurement of the package shell. Under this condition, the subsequent Packaging only needs to paste the MEMS device or chip 50 on the ceramic sheet of the TEC temperature control element, and connect it to the ...

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Abstract

The invention provides an integrated multifunctional ceramic packaging tube shell. The integrated multifunctional ceramic packaging tube shell comprises a ceramic packaged tube shell, a getter module, a temperature measurement module and a temperature control module; and the getter module, the temperature measurement module, the temperature control module and the ceramic packaging tube shell are designed integrally. According to the integrated multifunctional ceramic packaging tube shell, air suction, temperature control and temperature measurement functions of the ceramic packaging tube shell per se can be realized, subsequent packaging steps can be simplified, production efficiency can be improved, and a risk in device failure caused by the installation link of each module is reduced. In addition, as the getter module, the temperature control module and the temperature measurement module are integrated in the ceramic packaging tube shell, the integration level of the ceramic packaging tube shell can be improved, and reduction of the volume of the packaged device is benefited.

Description

technical field [0001] The invention relates to a ceramic packaging tube shell used for packaging MEMS devices, in particular to an integrated multifunctional ceramic package tube shell. Background technique [0002] At present, MEMS sensors such as infrared thermal imaging and THz generally use ceramic packaging shells to achieve high vacuum, constant temperature, and small-volume packaging. In order to achieve the working environment and packaging requirements of high vacuum, constant temperature, small volume and long life, it is usually necessary to use a combined assembly method in which multiple independent functional packaging components are assembled together. [0003] In the prior art, see figure 1 and figure 2 , in order to realize the high vacuum environment inside the package structure, it is necessary to fix the electric heating wire 21 in the independent getter element 20 on the metal electrode 12 reserved by the ceramic package shell 10 by means of spot wel...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81B7/00
CPCB81B7/0032B81B7/0038B81B7/0087B81B7/009
Inventor 赵照
Owner XINFOO SENSOR TECH CO LTD
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