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Optical Position Measuring Device

A measuring device and optical technology, applied in the direction of measuring devices, using optical devices, using optical devices to transmit sensing components, etc., can solve problems such as unsuitable measurement technology for detection and measurement tasks, and achieve the effect of accurately determining the position

Active Publication Date: 2018-12-25
DR JOHANNES HEIDENHAIN GMBH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The device known from JP 2005-326231 A is not suitable for measuring tasks in which more than these two degrees of freedom have to be detected by means of measuring technology

Method used

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Examples

Experimental program
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Embodiment Construction

[0041] With the help of Figure 1a , 1b, 2, 3a, 3b, 4 and 5 illustrate an embodiment of the optical position measuring device according to the present invention.

[0042] Figure 1a , 1b The scanning ray paths in different planes are shown here in highly schematic form, figure 2 shows a top view of the reflectance gage used, Figure 3a and Figure 3b are partial views of the upper and lower sides of the glass plate used in the scanning unit, respectively, and Figure 4 is a partial top view of the four detectors in the scanning unit. with the help of Figure 5 The diagram in illustrates the signal processing in the described position-measuring device

[0043] The optical position-measuring device according to the invention consists of a scanning unit 20 and reflective measuring standards 10 which are movable relative to each other. Scanning unit 20 and reflection measuring standard 10 are connected to two objects (not shown) that are movable relative to each other, the ...

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Abstract

An optical position measuring device for detecting the relative position of two objects that can move relative to each other, consisting of a scanning unit connected to one object and a reflective gauge connected to the other, the relative position information is obtained by the interference superposition of at least two pairs of sub-beams inferred. The beam incident from the light source is split in the scanning unit by the first splitting element into a plurality of partial beams in a first splitting plane. One part is deflected via deflection elements in the scanning unit in the direction of the reflective measuring standard, the other is broken up into further partial beams via the second resolution element. At two points of incidence of the reflection gauge, at least two pairs of partial beams are superimposed interferingly. The first and the second detector detect the first and the second scanning signal, from which information on the position of the object with respect to the vertical direction of movement and the first transverse direction of movement is derived.

Description

technical field [0001] The invention relates to an optical position measuring device. The position-measuring device is suitable for simultaneously detecting a vertical and at least one lateral degree of freedom of two objects that are movable relative to one another. Background technique [0002] Such an optical position measuring device is known, for example, from FIG. 6 of JP 2005-326231 A. The position-measuring device is used to detect the relative position of two objects that are movable relative to each other and consists of a scanning unit connected to one of the objects and a reflective gauge connected to the other of the two objects. Information about the relative position of the two objects is produced by the interferometric superposition of at least two partial beam pairs. In this case, the beam incident from the light source is split in the scanning unit in the first splitting plane via the first splitting element into at least one first, second and third parti...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/00G01D5/26
CPCG01B11/00G01D5/26G01D5/266G01B11/002G01B11/14
Inventor 沃尔特·胡贝尔
Owner DR JOHANNES HEIDENHAIN GMBH
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