A high-precision planar sub-aperture splicing detection method

Abstract

The invention discloses a high-precision planar sub-aperture stitching detection method. The method comprises steps: a sub-aperture stitching detection device is built; the part surface shape of a to-be-detected optical element is measured, and sub-aperture surface shape data are obtained and stored; an overlapped region local slope difference is calculated; the overlapped region local slope difference is used for fitting a quasi reference mirror surface shape through a fourth item and a sixth item of Zernike aberrations; the fit quasi reference mirror surface shape is subtracted to obtain sub-aperture surface shape data removing the quasi reference mirror surface shape; and a full-aperture surface shape is obtained through anti-tilting and translation. Accumulated errors of two kinds of stitching in an x direction and a y direction can be effectively removed, the stitching can be ensured to be continuous, no stitching marks exist, the planar surface shape sub-aperture stitching detection precision is improved, no extra accessory or no extra calibration process does not need to be added, and the method has the advantages of easy realization, high precision, and not increased system cost.

Description

technical field [0001] The invention relates to the field of surface shape detection of large-caliber planar optical elements, in particular to the field of high-precision planar sub-aperture splicing detection. Background technique [0002] The sub-aperture splicing interferometry technology can realize the measurement of large-aperture optical components at low cost, while retaining the high precision of small-aperture measurement. In 1982, C.J.Kim of the Optical Center of the University of Arizona in the United States first proposed the concept of subaperture stitching interferometry (1. [C.Kim, J.Wyant. Subaperture test of a large flat or a fastaspheric surface[J].Opt.Soc.Am ., 1981, 71:1587]). In 1985, T.W.Stuhlinger proposed the discrete phase method, using the optical phase measurements of a large number of discrete points distributed on the sub-aperture to describe the wavefront. This idea is a new milestone in the development of sub-aperture testing and the prototy...

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Problems solved by technology

Shanghai Institute of Optics and Mechanics Li Yong and others studied the stitching cumulative error produced by least squares stitching sub-apertures, and proposed a method to reduce the stitching cumulative error of planar sub-apertures (9. [Li Yong, Tang Feng, Lu Yunjun, Wang Xiangchao , et al. A method to reduce the cumulative error of planar sub-aperture stitching [J]. China Laser, 2015, 42(7): 0708006.]), but it does not take into account the accumulation of DC deviation and the local slope difference perpendicular to the stitching direction Impact on splicing

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