A Composite Molecular Pump Adopting Segmented Structure Traction Stage

Abstract

A compound molecular pump adopting segmented structure traction stage, the cylindrical traction stage adopts segmented structure, and the adjacent sections of the cylindrical traction stage are provided with circumferential grooves and circumferential bosses, and the circumferential concave The groove and the circumferential boss are arranged facing each other; when the stator is a smooth cylinder and the traction rotor is provided with a spiral groove, the circumferential groove is arranged on the traction rotor, the circumferential boss is arranged on the stator, and the traction rotor is formed from the circumferential concave The grooves are divided into several traction rotor segments; when the traction rotor is a smooth cylinder and a spiral groove is provided in the stator, the circumferential groove is arranged on the stator, the circumferential boss is arranged on the traction rotor, and the stator is divided into several sections by the circumferential groove. The stator segment; there is a spiral groove on the circumferential boss, and the spiral groove on the circumferential boss has the opposite spiral direction to the spiral groove on the traction rotor or stator; in the direction of air extraction, each traction rotor segment or stator segment The number of spiral grooves on the upper and circumferential bosses is set in an increasing manner, the groove depth of the spiral grooves is set in a decreasing manner, and the groove width of the spiral grooves is set in a decreasing manner.

Description

technical field [0001] The invention belongs to the technical field of vacuum equipment, and in particular relates to a composite molecular pump adopting segmented structure traction stages. Background technique [0002] Molecular pumps, as a kind of vacuum obtaining equipment that can obtain clean and high vacuum, have been widely used in many industrial fields. Among them, compound molecular pumps can still maintain high pumping performance in a wide pressure range. Therefore, in semiconductors, etc. It is widely used in the industry. [0003] Existing compound molecular pumps are mainly divided into two categories, one is designed by the combination of turbomolecular pump and disc traction molecular pump, that is, compound molecular pump with disc traction structure; the other is composed of turbo molecular pump and disc traction molecular pump. The barrel-type traction molecular pump is designed in combination, that is, the compound molecular pump with a barrel-type tra...

AI Technical Summary

Problems solved by technology

Due to the limitations of machining accuracy, assembly accuracy, centrifugal deformation and thermal deformation of the rotor, the gap between the traction stage rotor and the stator can only be appropriately increased to ensure the working reliability of the compound molecular pump, but the traction stage rotor and stator The leakage of the gap between the stators will increase, which will lead to the performance degradation of the composite molecular pump, especially when the composite molecular pump works in the transition flow state and the viscous flow state, the leakage of gas along the gap will increase, which will seriously affect the performance of the composite molecular pump. pumping performance

Images