A kind of multilayer inductance passive wireless LC temperature sensor
A temperature sensor, passive wireless technology, used in thermometers, thermometers and instruments with directly sensitive electrical/magnetic components, etc., can solve the problems of inconvenient wiring, poor sensitivity, large output capacitance and temperature nonlinearity, etc. , to achieve the effect of low cost, large sensitivity and increased sensitivity
Active Publication Date: 2018-02-23
SOUTHEAST UNIV
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Problems solved by technology
Although traditional wired temperature sensors can meet most applications, wiring is very inconvenient
The use of wireless temperature sensors can save a lot of manpower, material resources, and financial resources, and it is also very easy to implement technically, but there are few existing LC passive wireless temperature sensors, and they are generally realized based on changes in sensitive capacitance. For temperature detection, this temperature The sensor has the disadvantages of large nonlinear ratio between output capacitance and temperature, and poor sensitivity
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[0018] The present invention will be further described below in conjunction with the accompanying drawings.
[0019] Such as figure 1 Shown is a structural diagram of an embodiment of the present invention, in this embodiment N=2, the double-layer inductance passive wireless LC temperature sensor is divided into a first cover, a first detection inductance, and a second cover from top to bottom , the second detection inductance and the substrate 1; the first detection inductance and the second detection inductance have the same structure, and both include an inductance mold 3, and the inductance mold 3 is provided with a spiral-shaped groove, and liquid metal alloy 2 is injected in the groove , the liquid metal alloy forms a spiral inductor in the groove of the spiral shape; the metal oxide conformal layer 5 is formed in the groove and on the upper surface of the liquid metal alloy, and the height of the metal oxide conformal layer 5 in the groove is lower than that of the groo...
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The present invention provides a multi-layer inductor passive wireless LC temperature sensor. The multi-layer inductor passive wireless LC temperature sensor includes an LC resonant loop composed of a temperature sensitive inductor and a capacitor; the temperature sensitive inductor includes N layers of stacked detection inductors; the detection inductors are in series connection; cover sheets are arranged between two adjacent layers of detection inductors and at the top of the detection inductor at the topmost layer; the bottom of the detection inductor at the bottommost layer is provided with a substrate; each detection inductor is of the same structure and both comprise an inductor mould; the inductor mould is a spiral groove; a spiral inductor formed by liquid metal alloy is injected into the inductor mould; a metal oxide conformal layer is formed in the groove and at the upper surface of the liquid metal alloy; the height of the metal oxide conformal layer in the groove is lower than the height of the upper surface of the groove; and parasitic capacitors between two adjacent layers of detection inductors are connected in parallel to form the capacitor in the LC resonant loop. The multi-layer inductor passive wireless LC temperature sensor of the invention has the advantages of structural simplicity, high sensitivity and fast response.
Description
technical field [0001] The invention relates to a temperature sensor based on micro-electromechanical system technology, in particular to a multilayer inductance passive wireless LC temperature sensor. Background technique [0002] Compared with traditional sensors, passive wireless sensors have the advantages of smaller size and theoretically infinite life, and are very suitable for narrow and closed environments, harsh environments, and environments with rotating structures. LC passive wireless sensor is generally composed of capacitance and inductance. It is a kind of resonant sensor. It has the advantages of simple structure, no active components, and integrated processing. With the development of MEMS technology and Internet of Things technology Development, LC passive wireless sensor has become one of the main research directions in this field in the world. It is the most potential resonant passive wireless sensor and has a very important application prospect. Tempera...
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IPC IPC(8): G01K7/00
CPCG01K7/00
Inventor 任青颖王立峰黄燕黄庆安
Owner SOUTHEAST UNIV