Embedded piezoresistive micro stress sensor

Abstract

The invention provides an embedded piezoresistive micro stress sensor which is composed of a shell, chip resistors, sensitive elements, printed electrodes and a baseplate. The shell is composed of an annular structural component of which the thickness is 1.8mm and the diameter is 7.8mm and a stainless steel circular film which is fixedly installed at one end of the annular structural component in an embedded way. Diffusion silicon piezoresistive sensitive elements are adopted to act as the sensitive elements. Two sensitive elements are arranged at the central position of the circular film. The other two sensitive elements are arranged at the edge position of the film. According to the designed piezoresistive micro stress sensor, a microelectronic micromechanical technology is adopted so that the flat micro contour of the stress sensor can be realized, and the stress sensor can be conveniently installed in a solid engine to perform interface stress measurement. Besides, the stress sensor has a tension and compression bidirectional measurement function so that the stress sensor can measure compression stress and can also measure tension stress.

Description

technical field [0001] The invention relates to the technical field of piezoresistive stress sensors, in particular to an embedded piezoresistive miniature stress sensor. The test of material interface stress or internal stress. Background technique [0002] Structural health detection is very important for the safety and reliability of solid-state engines, and the ability to detect engine damage in real time, accurately, and reliably contributes to the assessment of engine structural integrity, reduces manufacturing costs, and avoids catastrophic structural accidents. Miniature stress sensors can be used for real-time stress testing of composite materials such as solid engines, ships and aircrafts, to determine and evaluate the quality and life of products, and to monitor and manage the health of products throughout their life cycle. [0003] Domestically, the engine health monitoring technology based on stress and strain is in its infancy. Foreign countries have used min...

AI Technical Summary

Problems solved by technology

However, similar domestic sensors are larger in size, with a diameter of 15mm and a thickness of 5mm, which cannot meet the requirements of solid engine interface stress measurement.

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