A microrefrigerator with droplet condensation and self-collection of water and its manufacturing method

Abstract

A drop-like condensation and self-collecting microrefrigerator, with a three-layer structure of an upper glass plate, a middle silicon plate and a lower glass plate, the upper glass plate and the middle silicon plate are combined to form a condenser, an evaporator, a liquid pipe and a steam tube, the lower glass plate and the middle silicon wafer are combined to form a high-temperature chip heat transfer area and a cooling water pipe. The present invention uses a specific frustum-hemispherical micron and nanometer double-layer heterogeneous structure to modify the silicon condensation surface, so that the steam can be rapidly condensed into drop-shaped droplets in the condenser and spontaneously concentrated near the liquid pipe, and at the same time by many The liquid tubes composed of capillary tubes provide a large capillary driving force to absorb heat into the evaporator. The present invention also relates to the manufacturing method of the above-mentioned micro refrigerator. The invention has the advantages of novel structure, small volume, light weight, good stability and excellent refrigeration performance.

Description

technical field [0001] The invention relates to the technical field of refrigerators, in particular to a dropwise condensation and self-collecting microrefrigerator and a manufacturing method thereof. Background technique [0002] The existing chip-level phase-change micro-device design scheme mainly adopts the micro-capillary pump suction loop scheme. The micro-refrigerator produced by this scheme is mainly composed of an evaporator, a condenser, a steam pipe, a liquid pipe, a liquid storage tank and a filling area. When the micro-cooler is working, the liquid first evaporates into steam in the evaporator, taking away the heat of the evaporator, the steam flows to the condenser through the steam pipe, condenses into liquid in the condenser, and releases heat to the external environment, and the liquid flows back through the liquid pipe to The evaporator completes a cycle. The fill zone is used to inject liquid, the reservoir is used to store excess liquid, and the steam g...

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to overcome the shortcoming of the low cooling effect of the above-mentioned existing phase change micro-refrigerators, and propose a high-efficiency heat-transfer phase-change micro-refrigerator with droplet condensation and self-collection and its manufacturing method

Images