Millimeter wave / terahertz ultra wide band open-short de-embedding method and system

Abstract

The invention discloses a millimeter wave / terahertz ultra wide band open-short de-embedding method, comprising the steps of: obtaining first, second and third scattering parameter test values of a test terminal of a test circuit in an open circuit state, a short circuit state and at the time of accessing to a device to be tested, and building an open circuit state set total parameter model in the open circuit state of a test structure according to the first scattering parameter test value; modifying the open circuit state set total parameter model for the first time; based on the total parameter model after first modification, building a short circuit state set total parameter model of the test circuit according to the second scattering parameter test value; modifying the short circuit state set total parameter model for the second time; obtaining a first modification scattering parameter and a second modification scattering parameter; and removing the first modification scattering parameter and the second modification scattering parameter from the third scattering parameter test value to obtain the scattering parameter value of the device to be tested. The method has the advantages of high de-embedding frequency, high accuracy, simple structure, convenient operation and low cost.

Description

Technical field [0001] The invention relates to the field of radio frequency testing, in particular to a millimeter wave / terahertz ultra-wideband open-circuit de-embedding method and system. Background technique [0002] With the rapid development of integrated circuit process technology, the process feature size is getting smaller and smaller, making the application frequency of integrated circuits higher and higher, and has now reached the millimeter wave / terahertz frequency band. In order to adapt to the development and application of integrated circuit technology in the above-mentioned frequency bands, it is urgent to establish an ultra-wideband device model suitable for millimeter wave / terahertz frequency bands. Testing is the basis for device modeling. However, when integrated circuit devices are being tested on-chip, devices often cannot be directly connected to probes, but must add test pads and input / output interconnections at their input / output ends. And other embedded...

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Problems solved by technology

[0005] The purpose of the present invention is to provide a millimeter-wave / terrestrial radio that can solve the above technical problems in view of the problems of lack of de-embedding or past embedding in the prior art, as well as the shortcomings of many de-embedding structures, complex testing process, high cost of tape-out and testing. Hertz ultra-wideband de-embedding method and system

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