Differential pressure sensor
A sensor and differential pressure technology, which is used in the measurement of pressure difference between instruments, multiple valves, and the measurement of fluid pressure. It can solve problems such as hysteresis error.
Active Publication Date: 2016-11-16
EHNDRESS KHAUZER GMBKH KO KG
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Problems solved by technology
This can lead to hysteresis errors in particular in the zero point and in the measuring range of the measuring signal of the differential pressure sensor which is dependent on the differential pressure
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[0050] figure 1 The differential pressure sensor 1 shown in includes a differential pressure measurement unit 2 having a measurement membrane 10, a first platform 20, and a second platform 30, wherein the measurement membrane 10 is arranged between the first platform and the second platform and extends along the periphery The junction pressure-tightly connects the two platforms so that the first pressure chamber 22 is formed between the first platform and the measurement membrane, and the second pressure chamber is formed between the second platform and the measurement membrane. The pressure chamber can be contacted with the first or second pressure through the pressure supply lines 24, 34, respectively, wherein the measuring membrane can be flexed according to the difference between the two pressures, and wherein the pressure difference measuring unit has especially capacitive or piezoresistive conversion. Energy sensor to convert the deflection of the measuring membrane into a...
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Abstract
The invention relates to a differential pressure sensor (1) comprising a differential pressure measuring cell (2) with a measuring membrane (10), two counter elements (20, 30), between which the measuring membrane is arranged, and a converter (40) and comprising an elastic clamping device (50) that has two clamping surfaces (53), each of which acts on a counter element (20, 30) rear face (26, 36) facing away from the measuring membrane (10). The clamping device (50) has at least one elastic element (56, 58) via which the clamping surfaces (52, 54) are mechanically coupled in order to clamp the differential pressure measuring cell (2) by means of an axial clamping force. The clamping surfaces (52, 54) are dimensionally stable, and the clamping device (50) has a bracket with two clamping elements (60, 62), each of which has one of the clamping surfaces (52, 54). At least one of the clamping elements has an elastic element, and the clamping elements are connected to each other under tension in order to exert a clamping force onto the differential pressure measuring cell (2). The two clamping elements (60, 62) have a central dimensionally stable section (64, 66) which comprises the clamping surfaces (52, 54). Elastic sections adjoin the dimensionally stable section (64, 66) of at least one clamping element, in particular of both clamping elements, said elastic sections forming the elastic elements (56, 58).
Description
Technical field [0001] The invention relates to a differential pressure sensor, in particular to a differential pressure sensor with static overload protection. Background technique [0002] Differential pressure sensors are usually optimized to measure the presence of large static pressure p 1 , P 2 Small pressure difference p 1 -p 2 . In this case, it is important to achieve the correct balance of sensitivity and overload resistance. Thus, for example, |p 1 -p 2 | / p 1 <1% can be applied to differential pressure|p 1 -p 2 |The measurement range. When the pressure p is missing during process installation 1 , P 2 At one time, the differential pressure sensor is loaded 100 times the measuring range. Differential pressure transducers that can resist these overloads are known. The effective protection of the sensitive differential pressure measurement unit is to connect the overload membrane and the differential pressure sensor hydraulically in parallel, wherein two pressures p ...
Claims
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IPC IPC(8): G01L13/02G01L19/06G01L19/14
CPCG01L13/026G01L19/0618G01L19/142G01L13/025G01L19/143
Inventor 英·图安·塔姆彼得·克勒费尔拉斐尔·泰伊朋本杰明·莱姆克
Owner EHNDRESS KHAUZER GMBKH KO KG