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Absolute linear time grating displacement sensor based on alternating electric field

A technology of displacement sensor and alternating electric field, which is applied in the direction of converting sensor output, instruments, and electrical devices, etc., to achieve the effects of improving stability, simple structure, and suppressing common-mode interference

Active Publication Date: 2016-12-07
通用技术集团国测时栅科技有限公司
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Problems solved by technology

Although these two kinds of electric field time grating displacement sensors can realize precise measurement, they adopt the incremental counting method, which has accumulated errors and can only identify the displacement within one cycle

Method used

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  • Absolute linear time grating displacement sensor based on alternating electric field
  • Absolute linear time grating displacement sensor based on alternating electric field
  • Absolute linear time grating displacement sensor based on alternating electric field

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Embodiment Construction

[0029] The structure and working principle of the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0030] Figure 1(a), Figure 1(b), figure 2 , image 3 As shown, the sensor of the present invention includes two parts: a probe base (1) and a scale base (2). Ceramics are used as the base material, and the upper surface of the fixed-length base is covered with four dielectric films in sequence, the first layer is a metal film, the second layer is an insulating film, the third layer is a metal film, and the fourth layer is an insulating protective film. The first layer of metal film is 4 flat strip wires located under the electrodes, that is, 4 excitation signal leads (2-2), which are respectively used to connect the corresponding electrode strips of the excitation electrodes A, B, C, and D into a group. The third layer of metal film is covered with four sets of excitation electrodes A, B, C, and D. The width of each el...

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Abstract

The invention discloses an absolute linear time grating displacement sensor based on an alternating electric field. The absolute linear time grating displacement sensor comprises a probe body and a rule body. A coarse measuring electrode I, a fine measuring electrode and a coarse measuring electrode II are successively disposed on the lower surface of the probe body from left to right. Excitation electrodes A, B, C and D are arranged on the upper surface of the rule body. Envelope lines formed by the vertex connection lines of the excitation electrodes A, B, C and D are sine curves which successively have 90 degree phase differences and periods not more than 2[pi]. A coupling electric field formed between the left and right parts of the rectangle electrode of the rule body and the square coarse measuring electrodes of the probe body senses an electric traveling wave signal to carry out opposite pole positioning and realize a coarse measurement function. A coupling electric field formed between the middle part of the rectangle electrode of the rule body and the dual sine fine measuring electrode of the probe body senses an electric traveling wave signal to carry out precision measurement and achieve a precise measurement function. A symmetrical differential structure is used to improve the stability of measurement, suppress common mode interference, and increase signal amplitude. The absolute linear time grating displacement sensor has the advantages of low power consumption, high precision, simple structure, low requirement for mechanical installation precision, and high-precision absolute displacement measurement in a large range.

Description

technical field [0001] The invention belongs to a precision linear displacement sensor, in particular to an absolute linear time grating displacement sensor based on an alternating electric field. technical background [0002] Traditional precision linear displacement measurement is mainly based on grating sensors, typically represented by gratings, magnetic gratings, capacitive gratings and other grating sensors, whose common feature is to use the grid lines that are spaced evenly as the measurement reference. In order to improve the measurement accuracy and resolution, these grid sensors use precise engraved lines and need to rely on high-precision electronic subdivision technology. The complex and harsh engraving process and electronic subdivision circuit result in high cost and poor anti-interference ability of the sensor. In recent years, a time grating sensor with clock pulse as the reference for displacement measurement has been developed in China, and a time grating ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B7/02G01D5/249
CPCG01B7/02G01D5/2497
Inventor 刘小康彭凯但敏郑方燕汤其富蒋维涛
Owner 通用技术集团国测时栅科技有限公司
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