A dynamic gas-liquid mixing gas distribution instrument
A gas-liquid mixing and gas distribution instrument technology, which is used in gas/vapor and liquid mixing, analyzing gas mixture, gas and gas/vapor mixing, etc. , passive problems, etc.
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[0021] The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.
[0022] Such as figure 1 In a preferred embodiment shown, the gas distribution part includes four gas circuits, wherein the first two-way solenoid valve 21 and the first mass flow controller 31 are connected in series on the first gas circuit 1, and the first two-way solenoid valve The first inlet of 21 is connected to the air inlet of the first gas path 1, the outlet of the first mass flow controller 31 is connected to the first air inlet of the mixing chamber 5; the second two-way is connected in series on the second air path 2 The solenoid valve 22 and the second mass flow controller 32, the first inlet of the second two-way solenoid valve 22 is connected to the inlet port of the second air circuit 2, the outlet of the second mass flow controller 32 is connected to the gas mixing chamber 5 The second air inlet is connected; the thir...
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