An exposure machine, an exposure method, and a displacement control method for a transparent alignment member
An exposure machine and transparent technology, which is applied in the direction of photomechanical equipment, microlithography exposure equipment, and photoplate making process of pattern surface, etc., can solve the problems of specific models and low utilization rate of UV masks
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[0037] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0038] An embodiment of the present invention provides an exposure machine, such as figure 1 As shown, it includes a light-shielding plate stage 20, a first positioning device 50, and a mask plate stage 30 arranged on the frame 10. The light-shielding plate stage 20 is connected to the first positioning device 50, and can be placed on the first positioning device 50. Driven to move on the horizontal plane, the frame 10 is also provided with a transparent align...
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