Terahertz wave polarizing beam splitter with silicon array structure

A polarization beam splitter and terahertz technology, applied in the field of terahertz beam splitters, can solve problems such as high cost, low polarization beam splitting efficiency, and complex structure, and achieve small size, high polarization beam splitting efficiency, and small volume Effect

Active Publication Date: 2019-01-25
CHINA JILIANG UNIV
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  • Claims
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Problems solved by technology

However, most of the existing terahertz wave polarization beam splitters have many shortcomings such as complex structure, low polarization beam splitting efficiency, and high cost. Therefore, research on simple structure, high polarization beam splitting efficiency, low cost, small size, and adjustable performance Terahertz wave polarizing beam splitter is of great significance

Method used

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  • Terahertz wave polarizing beam splitter with silicon array structure
  • Terahertz wave polarizing beam splitter with silicon array structure
  • Terahertz wave polarizing beam splitter with silicon array structure

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Embodiment 1

[0015] In this embodiment, the structure of the terahertz wave polarizing beam splitter is also as described above ( figure 1), the specific structure will not be repeated here. The structural parameters of the terahertz wave polarizing beam splitter are as follows: the material of the base layer is silicon dioxide, the refractive index is 1.5, the length is 22.5 μm, the width is 17 μm, and the thickness is 10 μm. The central rectangular silicon waveguide has a length of 17 μm, a width of 1 μm, and a thickness of 0.5 μm. The distance between the left side of the left long rectangular silicon waveguide and the left edge of the base layer is 2 μm. The distance between the first long rectangular silicon waveguide on the left and the second long rectangular silicon waveguide on the left, and the distance between the second long rectangular silicon waveguide on the left and the third long rectangular silicon waveguide on the left are equal to 1 μm, and the first long rectangular s...

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Abstract

The invention discloses a terahertz wave polarization beam splitter with a silicon array structure. It includes the base layer, the central rectangular silicon waveguide, the left one long rectangular silicon waveguide, the left two long rectangular silicon waveguides, the left three long rectangular silicon waveguides, the middle one short rectangular silicon waveguide, the middle two short rectangular silicon waveguides, the middle three short rectangular silicon waveguides Silicon waveguide, next long rectangular silicon waveguide, bottom two long rectangular silicon waveguides, right one long rectangular silicon waveguide, inverted L-shaped silicon waveguide, right second long rectangular silicon waveguide, L-shaped silicon waveguide, signal input terminal, first signal output terminal, the second signal output terminal, the signal is input from the signal input terminal, the first signal output terminal outputs TE waves, and the second signal output terminal outputs TM waves to obtain polarization beam splitting performance. The invention has the advantages of simple structure, high beam splitting rate, small size, low cost, easy integration and the like.

Description

technical field [0001] The invention relates to a terahertz wave beam splitter, in particular to a terahertz wave polarization beam splitter with a silicon array structure. Background technique [0002] In recent years, the terahertz wave between the mature millimeter wave and infrared light on the electromagnetic spectrum is undoubtedly a new research field. The frequency of terahertz wave is 0.1-10THz, and the wavelength is 30μm-3mm. For a long time, due to the lack of effective terahertz wave generation and detection methods, compared with traditional microwave technology and optical technology, people have little understanding of the nature of electromagnetic radiation in this band, so that this band has become the terahertz wave in the electromagnetic spectrum. void. With the breakthrough of terahertz radiation source and detection technology, the unique and superior characteristics of terahertz have been discovered and have shown great application prospects in materi...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B6/126
CPCG02B6/126
Inventor 章乐李九生
Owner CHINA JILIANG UNIV
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