The invention discloses a terahertz wave polarization beam splitter with a silicon array structure. It includes the base layer, the central rectangular silicon waveguide, the left one long rectangular silicon waveguide, the left two long rectangular silicon waveguides, the left three long rectangular silicon waveguides, the middle one short rectangular silicon waveguide, the middle two short rectangular silicon waveguides, the middle three short rectangular silicon waveguides Silicon waveguide, next long rectangular silicon waveguide, bottom two long rectangular silicon waveguides, right one long rectangular silicon waveguide, inverted L-shaped silicon waveguide, right second long rectangular silicon waveguide, L-shaped silicon waveguide, signal input terminal, first signal output terminal, the second signal output terminal, the signal is input from the signal input terminal, the first signal output terminal outputs TE waves, and the second signal output terminal outputs TM waves to obtain polarization beam splitting performance. The invention has the advantages of simple structure, high beam splitting rate, small size, low cost, easy integration and the like.