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All-dielectric polarization beam splitter and manufacturing method thereof

A technology of polarization beam splitting and manufacturing method, which is applied in the photoplate-making process, instruments, optics and other directions of the patterned surface, which can solve the problems of easy damage, unfavorable integration of photoelectric devices, unstable metal grid bars, etc., and achieve a non-destructive Effect

Pending Publication Date: 2022-07-05
UNIV OF SCI & TECH OF CHINA
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, metal nano gratings have two disadvantages when used as polarizers. One is that metal grids are conductive, which is not conducive to the integr

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  • All-dielectric polarization beam splitter and manufacturing method thereof
  • All-dielectric polarization beam splitter and manufacturing method thereof
  • All-dielectric polarization beam splitter and manufacturing method thereof

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Abstract

The invention discloses an all-dielectric polarization beam splitter, which comprises a substrate; the grating layer is formed on one side of the substrate, comprises a plurality of parallel wire gratings formed by adopting a nanoimprint process on the multiple non-metal dielectric layers, and is suitable for carrying out polarization beam splitting on incident light so as to reflect TE waves of the incident light and transmit TM waves of the incident light; wherein the multiple dielectric layers of each wire grating are formed by periodically stacking in the thickness direction according to a high and low refractive index alternating mode, and the wavelength of incident light is within the light filtering wavelength range of the multiple dielectric layers. The invention further provides a manufacturing method of the all-dielectric polarization beam splitter. The all-dielectric polarization beam splitter provided by the invention can realize polarization beam splitting of incident light.

Description

technical field [0001] At least one embodiment of the present invention relates to a polarizing beam splitter, and in particular, to an all-dielectric polarizing beam splitter and a manufacturing method thereof. Background technique [0002] Nanograting is a periodic pattern of nanometer scale formed on the substrate material. As an important polarization device, nanograting is widely used in optical products, such as liquid crystal display, optical communication and other fields. Common nanogratings mainly include dielectric gratings and metal gratings. The metal grating can separate the incident light according to different polarization modes through transmission and reflection, and the polarization extinction ratio of the transmitted light can reach more than 40dB, so the metal nanograting is a kind of polarizer with superior performance. However, there are two disadvantages when using metal nanogratings as polarizers. One is that the metal grids are conductive, which is...

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Application Information

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IPC IPC(8): G02B27/28G02B5/18G03F7/00
CPCG02B27/283G02B5/1819G02B5/1857G03F7/0002
Inventor 钱大憨凡流露刘志鹏李明阿特耶·阿里·阿巴克张放心张昕昱刘文
Owner UNIV OF SCI & TECH OF CHINA
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