Systems, methods, and media for calibrating a
scanning electron microscope (SEM). The
system includes a processor and a memory. The memory stores instructions that, when executed by the processor, configure the
system to perform operations. An
electron microscope image of a periodic structure is generated by the SEM. A
Fourier transform of the
electron microscope image is computed to generate a spectrum.
Reciprocal lattice vectors are computed based on a known periodicity of the periodic structure. A pixel
mask is generated based on the
reciprocal lattice vectors and applied to filter the spectrum. A quality metric is generated based on an aggregate magnitude of the filtered spectrum and a magnitude of a zero-frequency component of the filtered spectrum. A pixel scaling parameter, focus parameter, and / or stigmation parameter of the SEM are determined based on the quality metric.