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Apparatus and method for self-regulating fluid chemical delivery

A technology of conveying equipment and self-regulation, which is applied in chemical instruments and methods, container discharge methods, equipment loaded into non-pressure containers, etc., and can solve problems affecting results, etc.

Active Publication Date: 2019-11-05
APPLIED MATERIALS INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, as the fluid is consumed in the ampoule, temperature and pressure conditions may change, changing the concentration of the chemical being delivered, affecting the outcome of the process being performed

Method used

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  • Apparatus and method for self-regulating fluid chemical delivery
  • Apparatus and method for self-regulating fluid chemical delivery
  • Apparatus and method for self-regulating fluid chemical delivery

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Embodiment Construction

[0019] The present disclosure relates to chemical delivery apparatus and methods in which the level of a fluid chemical in an ampoule is advantageously self-adjusting. More specifically, the level of fluid in the vapor pull or bubbler functional volume can be self-adjusting, and a substantial portion of the stored fluid can be isolated from the carrier gas within the enclosed volume. The ampoule can be divided into two functional volumes, a first volume or lower vapor pull / bubbler volume within the first reservoir, and a second or upper refill volume within the second reservoir. The second volume can accommodate the fluid delivered to the first volume. The fluid in the first volume may be subject to a constant flow of carrier gas, whereas the fluid in the second volume may not be subject to a constant flow of carrier gas, thereby minimizing breakdown of the chemical. The fluid level of the second volume may vary as the chemical is supplied to the first volume.

[0020] The s...

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PUM

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Abstract

Methods and apparatus for chemical delivery are provided herein. In some embodiments, a first storage tank holds a first volume of fluid, receives a carrier gas, and outputs the carrier gas along with vapor from the first volume of fluid. A second sump contains a second volume of fluid and is capable of delivering a portion of the second volume of fluid to the first sump. A self-regulating tube extends from the first sump to a region in the second sump above the second volume of fluid.

Description

technical field [0001] Embodiments of the present disclosure relate generally to fluid chemical delivery, and more particularly, to self-regulating fluid chemical delivery. Background technique [0002] Chemicals used, for example, in semiconductor device processing are delivered to the processing chamber using fluid-containing ampoules. This known ampoule generally comprises a cartridge in fluid communication with an inlet port and an outlet port using a carrier gas which is fed through the ampoule. For example, a carrier gas is fed into the space above the fluid and can flow over the fluid and entrain vapor from the space above the fluid. As another example, a bubbler tube is used to feed a carrier gas into the fluid, saturate the fluid, and carry away some of the fluid. The ampoule can be used until all fluid is removed, at which point the ampoule is refilled or replaced. Alternatively, the ampoule may be refilled periodically based on measurements taken using an in si...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B01J4/00B01J4/02
CPCG05D9/02Y10T137/7306Y10T137/6416F17C6/00F17C13/021F17C13/026F17C13/04F17C2227/0302F17C2205/0323F17C2270/0518F17C2250/0631B01J4/02C23C16/4481G05D9/12F24F6/025
Inventor 马丁·杰夫·萨里纳斯董友群戴维·汤普森张梅
Owner APPLIED MATERIALS INC