Inertial piezoelectric motor-based scanning tunneling microscope
A technology of piezoelectric motors and scanning tunnels, applied in the field of piezoelectric positioners, to achieve the effect of reducing requirements, reducing complexity and manufacturing costs, and large driving capacity
Active Publication Date: 2017-03-29
NANJING UNIV OF POSTS & TELECOMM
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[0007] Purpose of the invention: In order to solve the problems existing in the existing scanning tunneling microscope system
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[0021] The present invention will be further described below by specific embodiment:
[0022] Such as figure 1 As shown in the present invention, a scanning tunneling microscope based on an inertial piezoelectric motor includes a piezoelectric scanning tube 1, a T-shaped insulating guide rail 2, four silicon nitride balls 3, a metal shrapnel 4, a slide rod 5, and a mirror body 6 and probe 7. Among them, four silicon nitride balls 3 and metal elastic pieces 4 are bonded and fixed on the insulating guide rail 2, and the sliding rod 5 inside is fixed by extrusion. The insulating guide rail 2 is glued and fixed on one end of the piezoelectric scanning tube 1 , and the other end of the piezoelectric scanning tube 1 is glued and fixed on the microscope body 6 .
[0023] Its working principle is:
[0024] When the four external electrodes of the piezoelectric scanning tube 1 are grounded, a pulse voltage signal is applied to the internal electrodes of the piezoelectric scanning tu...
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The present invention relates to an inertial piezoelectric motor-based scanning tunneling microscope. The microscope comprises a piezoelectric scanning tube, a T-shaped insulation guide rail, four silicon nitride beads, a metal elastic sheet, a slide rod, a microscope body and a probe, wherein the four silicon nitride beads and the metal elastic sheet are bonded onto the insulation guide rail so as to fix the slide rod in the insulation guide rail by means of squeezing; the insulation guide rail is fixedly bonded onto one end of the piezoelectric scanning tube; the other end of the piezoelectric scanning tube is fixedly bonded onto the microscope body of the microscope; based on the inertia of the slide rod, one path of impulse voltage signals is applied to the four external electrodes of the piezoelectric scanning tube, so that the nanometer-level stepping of the slide rod can be realized; after the stepping is completed, two paths of push-pull voltage signals with different frequencies are applied to the four external electrodes of the piezoelectric scanning tube, so that the X / Y-direction scanning of the surface of a sample can be realized; and the internal electrode of the piezoelectric scanning tube is used for scanning feedback control. The structure of the inertial piezoelectric motor-based scanning tunneling microscope of the invention is very simple, nanometer-level stepping and atomic precision scanning can be realized with just one piezoelectric scanning tube adopted, and therefore, the inertial piezoelectric motor-based scanning tunneling microscope is very suitable for being applied to extreme conditions, such as extremely-low temperature and super-strong magnetic field conditions, which largely limit the microscope body of a microscope.
Description
technical field [0001] The invention relates to a micro-drive system, in particular to a nano-stepper used in a scanning probe microscope system, and belongs to the technical field of piezoelectric positioners. Background technique [0002] Nanomotor refers to a new type of micro-actuator that uses piezoelectric ceramics, acoustic vibrations and small deformations of electrostrictive materials to convert electrical energy into the form of movement of mechanical parts. Due to the advantages of nano-level positioning accuracy, millimeter-level travel, simple and firm structure, and large driving force, it is widely used in nanotechnology, micromechanics and microsystems, communication sensing technology, semiconductor technology, optoelectronic technology, electronic scanning technology, microorganisms, etc. Ideal positioning device in fields such as technology and aerospace, especially in nanoscience research under extreme conditions such as extremely low temperature and supe...
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IPC IPC(8): G01Q10/04
CPCG01Q10/04
Inventor 庞宗强张悦
Owner NANJING UNIV OF POSTS & TELECOMM