The invention discloses an ultrasonic precision micro-fluidic
chip based on a nano motor array and an implementation method thereof. The ultrasonic precision micro-fluidic
chip comprises a substrate,a cover plate, a piezoelectric
transducer, a film fixed with a nano motor, a liquid inlet and outlet
pipe and a
liquid medium. The piezoelectric
transducer excites and drives the whole micro-fluidic
chip to vibrate at ultrasonic frequency, a specific acoustic flow field is generated in the micro-channel, meanwhile, a catalyst component contained in the nano-motor promotes the substrate to be decomposed to generate bubbles, and vibration of the bubbles in the acoustic flow field is used for controlling
small particles around the bubbles to move along a specific track. The
liquid medium is catalyzed by the nano motor array to be decomposed to generate bubbles, and directional movement of tiny particles is controlled by utilizing local acoustic flow field change caused by bubble vibration. According to the micro-particle
motion control mode, bubble vibration in the acoustic flow field is used as a power source, the motion speed of the micro-particles is effectively increased, the micro-particles of various shapes and sizes can be controlled, no special requirement is needed for the material of the controlled micro-particles, and thus the application range is wide.