105 results about "Thermophoresis" patented technology

Methods and apparatus for using a flow of a relatively cool gas to establish a temperature gradient between a reticle and a reticle shield to reduce particle contamination on the reticle are disclosed. According to one aspect of the present invention, an apparatus that reduces particle contamination on a surface of an object includes a plate and a gas supply. The plate is positioned in proximity to the object such that the plate, which has a second temperature, and the object, which has a first temperature, are substantially separated by a space. The gas supply supplies a gas flow into the space. The gas has a third temperature that is lower than both the first temperature and the second temperature. The gas cooperates with the plate and the object to create a temperature gradient and, hence, a thermophoretic force that conveys particles in the space away from the object.

Thermophoresis within lithography systems for protecting reticles from contaminants (e.g., floating particles). Generally, thermophoretic protection is implemented by maintaining the reticle at a higher temperature than its surrounding environment. Thermophoretic protection can be maintained throughout a reticle's use in a lithography system. For example, a reticle can be thermophoretically protected while in storage, through various stages of transportation via a reticle handler (also referred to as an end-effector), to its period of use while attached to a reticle chuck.

Methods and apparatus for using a flow of a relatively cool gas to establish a temperature gradient between a reticle and a reticle shield to reduce particle contamination on the reticle are disclosed. According to one aspect of the present invention, an apparatus that reduces particle contamination on a surface of an object includes a plate and a gas supply. The plate is positioned in proximity to the object such that the plate, which has a second temperature, and the object, which has a first temperature, are substantially separated by a space. The gas supply supplies a gas flow into the space. The gas has a third temperature that is lower than both the first temperature and the second temperature. The gas cooperates with the plate and the object to create a temperature gradient and, hence, a thermophoretic force that conveys particles in the space away from the object.

Multicomponent nanoparticles materials and apparatuses and processes therefor are disclosed. In one aspect of the disclosure, separate particles generated from solution or suspension or by flame synthesis or flame spray pyrolysis, and the resultant particles are mixed in chamber prior to collection or deposition. In another aspect of the disclosure, nanoparticles are synthesized in stagnation or Bunsen flames and allowed to deposit by thermophoresis on a moving substrate. These techniques are scalable allowing mass production of multicomponent nanoparticles materials and films. The foregoing techniques can be used to prepare composites and component devices comprising one or more lithium based particles intimately mixed with carbon particles.

The invention discloses a thermophoretic air purifying device and a thermophoretic air purifying method, and belongs to the technical field of air purification. In a principle of a thermophoretic technology, a stable temperature gradient is artificially created, so that particles in air in a temperature field are enabled to change the motion tracks under the action of a thermophoretic force, are attached to a low-temperature surface and are removed. The thermophoretic air purifying device comprises a shell, a thermophoretic dust tube and a blower, wherein through forced ventilation or thermal pressure ventilation of the blower, air flows through the thermophoretic dust tube and is filtered. Through theoretical calculation, software simulation and real object production test, the thermophoretic air purifying device is proved to have the characteristics of greenness, environment friendliness, no secondary pollution, low resistance, high efficiency of an air filtering device and the like and has a very good filtering effect on fine particles; the average one-pass efficiency of PM 2.5 is nearly 40%, and the highest one-pass efficiency can be as high as 60%; and the thermophoretic air purifying device is simple in structure, and thermophoretic dust tube is convenient to detach for cleaning, so that the maintenance cost is low.

The invention relates to a micro-nano particles detection system and a method thereof. The system comprises a heating unit, a sample chamber unit, and a signal acquisition unit, wherein the heating unit is arranged outside the sample chamber unit for heating a sample in the sample chamber unit; micro-nano particle fluid is loaded in the sample chamber unit, the heating unit is used for heating thesample chamber unit, the sample chamber unit generates the thermophoresis effect, the micro-nano particles are gathered at a one side with temperature lower than the micro-nano particle fluid in thesample chamber unit, the signal acquisition unit is used for collecting the correlation information of the micro-nano particles, and corresponding analysis is carried out. The micro-nano detection system performs accumulation on the particles by the thermophoresis effect, gathering and detection can be completed by requiring micro nano particles, pre-treatment and purification of the micro nano particles are not required, the micro-nano particles detection system is generally used for an aptamer and an antibody, and has wide application prospect.

The invention discloses a novel air purifier based on a thermophoresis effect, which comprises an air purifying chamber, an air inlet, a heater, a negative ion generator, a grain catcher and an air outlet, wherein the air inlet is located on the upper part of the air purifying chamber; the heater is arranged on the upper part in the air purifying chamber; the negative ion generator is arranged on the lower part in the air purifying chamber; the grain catcher is located on the lower part of the negative ion generator; the air outlet is located at the bottom of the air purifying chamber; the grain catcher is a superfine glass fiber; and the aperture is 0.1-0.3 microns. Under the thermophoresis effect, PM2.5 grains are electrified and accelerated to fall under the action of the negative ion generator and are collected by the grain catcher, so that the absorbing rate of the PM2.5 grains reaches 30-50%.

The invention belongs to the technical field of microcontrol systems, and particularly relates to a thermophoresis coupling subparticle sorter. The thermophoresis coupling subparticle sorter is formed by bonding a substrate I and a substrate II, wherein an inlet for introducing liquid containing different subparticles is formed in the substrate I; an outlet for exporting the sorted subparticles is also formed in the substrate I; a sorting channel is formed in the substrate II; one end of the sorting channel is connected with the inlet of the substrate I, and the other end of the sorting channel is connected with the outlet in the substrate I; the sorting channel comprises an upper wall surface and a lower wall surface; an electrifiable heating chip is arranged on the lower wall surface for driving the subparticles to generate thermophoresis motion. The invention provides the subparticle sorter which realizes sorting according to the particle size, makes use of a thermophoresis coupling technology and is high in sorting efficiency and high in precision; the preparation process is simple, and the fluid resistance is low; no moving element is needed in the sorter, so that abrasion and blocking of the channel are avoided, and the pressure balance of fluid is facilitated.

The invention relates to a method for removing fine particles in a dust-contained gas, which belongs to the technical field of dust removal. The method is characterized by comprising the following steps: leading the dust-contained gas to pass through at least one stage of dry type static dust removing field to remove most part of rough particles; discharging the removed particles in a dry form from a dust discharge opening of the static dust removing field at the lower part; and leading the gas discharged from the dry type static dust removing field to enter a final stage statics and thermophoresis synergy field to remove the fine particles. The final stage statics and thermophoresis synergy field reduces the temperature of an electrode plate in such a way that a water film is applied to the surface of the electrode plate or a cooling medium is charged into the electrode plate so that the average temperature of the electrode plate is at least 50 DEG C lower than the average temperatureof the gas. Compared with the prior art, the method can effectively remove the fine particles which are difficult to remove by the common dust removing equipment; in addition, the inventionhas reasonable design and compact structure and is beneficial for large-scale application.

During a tray column wet flue gas desulphurization process, gas and liquid between column trays do not directly contact each other, and a moisture content of flue gas is relatively high. Aiming at the characteristics, the invention provides a method and an apparatus used for promoting PM2.5 removing. The method and the apparatus are provided based on a heterogeneous condensation principle. The apparatus is composed of a deduster, a tray column, and steam-jet nozzles arranged between the column trays of the tray column. The method comprises steps that: an appropriate amount of normal-pressure saturated steam is injected between the column trays, and an inlet gas-liquid temperature difference of the column is regulated in auxiliary, such that the flue gas is saturated between the column trays and during the contact process with a desulphurization solution on the column trays; the super-saturated vapor is subject to nucleation condensation with PM2.5 as condensation nuclei, and diffusiophoresis and thermophoresis effects are generated, such that the granularity and the mass of PM2.5 are increased; and PM2.5 is collected by the desulphurization solution on the column trays with high efficiency. The technology provided by the invention is simple. When an appropriate amount of steam is added between the column trays, and the inlet gas-liquid temperature difference of the column is regulated in auxiliary, the tray column wet flue gas desulphurization apparatus can be provided with a function for increasing the PM2.5 granularity and for removing PM2.5.

The invention provides a sensor device which comprises an input flow channel (10) for receiving a gas flow with entrained matter to be sensed. A thermophoretic arrangement (14a, 14b) is used to induce a thermophoretic particle movement from a first, warmer, region (16) of the input flow channel to a second, cooler, region (18) of the input flow channel (10). A sensor (24) comprises a particle sensor component at or downstream of the first region (16) of the input flow channel (10). The invention provides the benefit of pre-filtering (e.g. removal of most suspended solids / liquids) without the need for a physical filter that can become blocked.

A method for analyzing a target molecule using thermophoresis is provided. The method of the invention comprises (1) providing a solution containing samples, labeled molecules, and probe particles; (2) providing a temperature control system to create a temperature gradient within the solution; (3) detecting the expression level of the labeled molecule in a predetermined area and a contrast area; and (4) analyzing the difference in the expression level of the labeled molecules between the predetermined area and the contrast area to determine the result. In another embodiment of the invention, the solution contains samples and “labeled molecule-reactant-probe particle” complexes. In the present invention, the probe particles are used to increase the difference in thermophoresis between the molecular complexes and the free labeled molecules, which can improve the accuracy of the quantification of the target molecules using thermophoresis.

A method that includes rotating a wafer, heating the wafer, applying a first liquid through one or more nozzles to a center of a topside of the wafer that is cooler than the heated wafer, and translating the one or more nozzles to an outer diameter edge of the wafer.

A method and apparatus for removing minute particles from a surface of a sample are provided that prevent redeposition of the particles onto the surface. By combining thermophoresis with laser assisted particle removal (LAPR), the methods and apparatus remove minute particles (for example, micrometer and nanometer sizes) and assure that they will not redeposit.

An efficient device for capturing fast moving particles has an adhesive particle shield that includes (i) a mounting panel and (ii) a film that is attached to the mounting panel wherein the outer surface of the film has an adhesive coating disposed thereon to capture particles contacting the outer surface. The shield can be employed to maintain a substantially particle free environment such as in photolithographic systems having critical surfaces, such as wafers, masks, and optics and in the tools used to make these components, that are sensitive to particle contamination. The shield can be portable to be positioned in hard-to-reach areas of a photolithography machine. The adhesive particle shield can incorporate cooling means to attract particles via the thermophoresis effect.

The invention discloses a step short-tube thermal pour deprivator absorbing grains and relates to the short-tube combination dedusting system through cooling water in the short bushing ring-clapping layer, and belongs to the field of dedusting or environmental protection technology. The deprivator comprises thermal pour working section, transitional flowing section, inlet valve, outlet valve and dedusting by-pass system. The thermal pour section adopts the ring short bushing with water cooling system. The transitional flowing section adopts the single short tube. The thermal pour and the transitional flowing sections are collocated alternatively and connected by flanges. The invention makes use of short tube and non-sufficient flowing effect to increase the thermal depositing efficiency in every tache under thermal pour effect and finally it arrives relatively high gross depositing efficiency. The invention has low manufacturing and transporting costs, simple implementing and operating methods. The deprivator has two basic types of direct channel combination and square combination, which can effectively deprivate the grains being absorbed.

Described is a method for fractionalizing nanoparticles according to the conductivity of the particle, thus enabling the production of large numbers of particles with uniform conductivity. The method is based on a modified thermophoresis process wherein a temperature gradient is produced in a mixture of particles and the most conductive particles are selectively deposited on a warm surface. In contrast to conventional thermophoresis methods, the temperature gradient that drives the fractionalization process is produced using a light source.

The invention provides a sensor device which comprises an input flow channel (10) for receiving a gas flow with entrained matter to be sensed. A thermophoretic arrangement (14a, 14b) is used to induce a thermophoretic particle movement from a first, warmer, region (16) of the input flow channel to a second, cooler, region (18) of the input flow channel (10). A sensor (24) comprises a particle sensor component at or downstream of the first region (16) of the input flow channel (10). The invention provides the benefit of pre-filtering (e.g. removal of most suspended solids / liquids) without the need for a physical filter that can become blocked.

A method for analyzing a component is provided. The method includes the steps of: (iii) providing the electrophoretic or thermophoretic movement of the component into a second fluid flow; (iv) diverting a part of a first fluid flow, a part of the second fluid flow, or parts of the first fluid flow and the second fluid flow, wherein the diverted part is a third fluid flow which includes, the component; (v) contacting the third fluid flow with a fourth fluid flow, such as to form a laminar flow; (vi) providing the diffusion of the component into the fourth fluid flows.