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Photoelectron packaging flexible parallel platform end pose detection system and method

A detection system, optoelectronic technology, applied in the direction of using optical devices, measuring devices, instruments, etc., can solve the problems that affect the detection and adjustment of the platform, interfere with the movement of the platform, and achieve the effects of low cost, avoiding interference, and convenient installation

Active Publication Date: 2017-04-05
CENT SOUTH UNIV
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Problems solved by technology

[0004] Since the control of the existing six-degree-of-freedom flexible parallel platform is to indirectly obtain the end pose of the flexible parallel platform by calculating the displacement of the grating ruler, and the detection device is fixed on the moving platform, the additional pressure will interfere with the movement of the moving platform. Therefore, it will affect the results of platform position positioning and actual pose detection and adjustment.

Method used

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  • Photoelectron packaging flexible parallel platform end pose detection system and method
  • Photoelectron packaging flexible parallel platform end pose detection system and method
  • Photoelectron packaging flexible parallel platform end pose detection system and method

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Embodiment Construction

[0028] The specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0029] In one embodiment according to the present application, refer to figure 1 and figure 2 , providing an optoelectronic packaging flexible parallel platform end pose detection system, the system includes six sets of pose detection devices for detecting the pose values ​​of the six degrees of freedom of the moving platform 4 .

[0030] The pose detection device includes a laser displacement sensor. The pose detection accuracy of the pose detection device is 10 μm. The purpose of the six sets of pose detection devices is to detect the pose of the center of the moving platform 4 .

[0031] The pose detection device is located in the XYZ Cartesian coordinate system, a...

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Abstract

The invention provides a photoelectron packaging flexible parallel platform end pose detection system and method; the system comprises 6 pose detection devices used for detecting pose values of 6 degrees of freedom of a mobile platform; 6 sensors are respectively fixed on a support outside the mobile platform; only a detection baffle plate is arranged on the mobile platform so as to mitigate the pressure on the mobile platform, and preventing interferences on mobile platform motions; the sensor is small in size, easy to mount, and low in cost; the mobile platform pose detection of the flexible parallel platform comprises macroscopic pose detection and microscopic pose detection; the macroscopic displacement allows the pose precision to be controlled within 10 micrometers; 6 pose detection devices can detect real poses of the 6 degrees of freedom platform; microscopic pose detection can be adjusted by an optical power meter; the optical power meter can be used to observe light transmission amount data, thus carrying out fine adjustment.

Description

technical field [0001] The present invention relates to the technical field of flexible parallel platform detection, and more specifically, to a system and method for detecting the position and posture of the end of a flexible parallel platform for optoelectronic packaging. Background technique [0002] Optoelectronic packaging is the process of optically aligning and coupling optoelectronic devices with input and output array fibers using a six-degree-of-freedom motion platform. The motion platform for optoelectronic packaging needs to achieve six-degree-of-freedom motion and sub-micron positioning accuracy. The traditional motion platform adopts a tandem structure. The parallel motion platform has the advantages of strong bearing capacity, good rigidity, compact structure, good dynamic performance and good precise positioning ability. At present, it has been more and more widely used in the fields of optical precise orientation system, precision / ultra-precision machining,...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/03G01B11/26G01B11/00
CPCG01B11/00G01B11/03G01B11/26
Inventor 周海波段吉安王晓玲侯富龙罗定辉
Owner CENT SOUTH UNIV
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