Method of testing depth of tiny hole

Abstract

The present invention provides a method of testing the depth of a tiny hole. According to the method, the three-dimensional surface reconstruction function of a scanning electron microscope is adopted to test the depth of the tiny hole. The method is applicable to tiny hole depth testing which cannot be realized by mechanical testing and optical testing. A metal material with a tiny hole is intercepted, the maximum diameter of the metal material being smaller than 25mm; the surface of the metal material is polished and dried; and the metal material is bonded on a sample table through using an conductive adhesive; the sample table with the sample is arranged on a carrier stage so as to be vacuumized; the parameters of the scanning electron microscope are set, and the scanning electron microscope is debugged so that the scanning electron microscope can have a clear field of view, and the scanning electron microscope is used to shoot the electronic image of the hole; the three-dimensional surface reconstruction function of the scanning electron microscope is utilized to obtain a clear three-dimensional image of the hole; and the depth value of the hole can be obtained according to the height difference of the surface of the hole and the bottom of the hole in the three-dimensional surface reconstructed image. With the method of the invention adopted, the three-dimensional clear display of the tiny hole can be realized, and the depth of the tiny hole can be measured.

Description

technical field [0001] The invention relates to a method for testing the depth of tiny holes, which is a method for testing the depth of tiny holes by using the three-dimensional surface reconstruction function of a scanning electron microscope, belonging to the field of metal materials and measurement. Background technique [0002] In the field of materials and machining, the depth of holes is mainly determined by means of optical or mechanical testing. However, for micro-holes with extremely small size (less than 1mm), both mechanical testing means and optical means are greatly limited, and it is difficult to obtain the depth data of tiny holes. [0003] Metallographic microscope is a high-tech product developed by combining optical microscope technology, photoelectric conversion technology, and computer image processing technology. It can easily observe metallographic images on the computer, so as to analyze the metallographic spectrum. Rating and outputting and printing...

AI Technical Summary

Problems solved by technology

[0005] The depth of field of general metallographic microscopes is relatively shallow, and they are used to observe relatively flat samples. Of course, there are metallographic microscopes with high depth of field, but the magnification of the image is limited, and it is impossible to measure the depth of tiny holes.

In addition, the secondary electron image of the scanning electron microscope is suitable for observing the surface morphology of the sample, and is not suitable for measuring the depth of tiny holes.

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