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A Calculation Method of Infrared Optical Constants of Yttrium Fluoride Optical Thin Film

A calculation method and infrared optical technology, applied in the direction of optical instrument testing, optical performance testing, machine/structural component testing, etc., to achieve a universal effect

Active Publication Date: 2019-03-01
TIANJIN JINHANG INST OF TECH PHYSICS
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] The present invention proposes a calculation method for infrared optical constants of yttrium fluoride optical thin films to solve how to establish the infrared dielectric constant model of yttrium fluoride thin films, accurately and completely characterize the characteristics of water-containing vibration absorption and intrinsic vibration absorption of thin films, so as to obtain clear The problem of optical constant of yttrium fluoride in physical meaning

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  • A Calculation Method of Infrared Optical Constants of Yttrium Fluoride Optical Thin Film

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[0043] In order to make the purpose, content, and advantages of the present invention clearer, the specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments.

[0044] This embodiment provides a YF 3 A method for calculating infrared optical constants of an optical film, the method specifically includes the following steps:

[0045] 1. Establish YF 3 Thin film composite permittivity model, which includes the vibration absorption permittivity model of water and YF 3 Intrinsic vibration absorbing dielectric constant model.

[0046] The formula for the imaginary part of the permittivity of the composite permittivity model is as follows:

[0047]

[0048] The formula for the real part of the permittivity of the composite permittivity model is as follows:

[0049]

[0050] Among them, ω j0 is the center frequency of the jth water vibration peak, A j is the intensity of ...

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Abstract

The invention belongs to a field of optical thin films and specifically relates to an infrared optical constant calculating method for a yttrium fluoride optical thin film in an infrared band. According to the invention, through constructing a four-oscillator composite model of a dielectric constant of the yttrium fluoride optical thin film, measured substrate-film spectrum reflectivity and spectrum spectral transmittance are taken as a compound target and a substrate-film physical model is utilized for back calculation of a dielectric constant of the thin film and the optical constant of the thin film is calculated out through the dielectric constant. The method provided by the invention has universality in optical constant calculation of yttrium fluoride optical thin film material prepared in all the different deposition ways.

Description

technical field [0001] The invention belongs to the field of optical thin films, and in particular relates to a method for calculating optical constants of yttrium fluoride optical thin film materials in the infrared band. Background technique [0002] Optical materials in the infrared band, such as silicon, germanium, zinc sulfide, zinc selenide and chalcogenide glass, etc., must be anti-reflection treatment when used as a lens of an infrared optical system due to the high residual reflectivity of their surface. Since the infrared optical bands are generally used in 3-5μm and 8-12μm, the use of broadband infrared anti-reflection film technology can effectively achieve high-efficiency anti-reflection of infrared optical components. Broadband anti-reflection films are generally deposited alternately with different refractive index film materials, and the order and thickness of the film layers can be determined by the film design method. At present, the thin film materials co...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01M11/02G01N21/59G01N21/55
CPCG01M11/00G01N21/55G01N21/59
Inventor 刘华松陈丹刘丹丹杨霄孙鹏冷健季一勤
Owner TIANJIN JINHANG INST OF TECH PHYSICS