Two-dimensional long-range surface profile detection device and detection method
A long-range surface shape detection and two-dimensional array technology, which is applied in the direction of measuring devices, optical devices, instruments, etc., can solve problems such as difficult detection of bending mechanisms, and achieve error elimination, environmental vibration insensitivity, and high-precision one-dimensional scanning measured effect
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[0030] Attached below Figure 1-4 , give a preferred embodiment of the present invention, and give a detailed description, so that the functions and characteristics of the present invention can be better understood.
[0031] Such as figure 1 As shown, the two-dimensional long-range surface shape detection device of the present invention includes a semiconductor laser 1, a two-dimensional array structure π phase plate 2, a beam splitter 3, a guide rail (not shown), a pentagonal prism 4 installed on the guide rail, and a lens 5 , a rectangular prism module and a CCD detector 11. Among them, CCD detector 11 can also adopt CMOS detector or other area array detector with high resolution; semiconductor laser 1 can also adopt helium-neon laser 1 or other monochromatic light source; two-dimensional array structure π phase plate 2 Can adopt "one" shape, "ten" shape or other types of geometric structures; lens 5 is an f-theta lens 5 optimized for the specific wavelength of semiconduct...
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