Two-dimensional long-range surface profile detection device and detection method

A long-range surface shape detection and two-dimensional array technology, which is applied in the direction of measuring devices, optical devices, instruments, etc., can solve problems such as difficult detection of bending mechanisms, and achieve error elimination, environmental vibration insensitivity, and high-precision one-dimensional scanning measured effect

Active Publication Date: 2017-06-13
SHANGHAI INST OF APPLIED PHYSICS - CHINESE ACAD OF SCI
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Problems solved by technology

The interferometer and Shack-Hartmann method are difficult to detect the bending mechanism due to the structure of their own equipment, and are not suitable for non-planar optical elements with a small surface curvature radius

Method used

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  • Two-dimensional long-range surface profile detection device and detection method
  • Two-dimensional long-range surface profile detection device and detection method
  • Two-dimensional long-range surface profile detection device and detection method

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Embodiment Construction

[0030] Attached below Figure 1-4 , give a preferred embodiment of the present invention, and give a detailed description, so that the functions and characteristics of the present invention can be better understood.

[0031] Such as figure 1 As shown, the two-dimensional long-range surface shape detection device of the present invention includes a semiconductor laser 1, a two-dimensional array structure π phase plate 2, a beam splitter 3, a guide rail (not shown), a pentagonal prism 4 installed on the guide rail, and a lens 5 , a rectangular prism module and a CCD detector 11. Among them, CCD detector 11 can also adopt CMOS detector or other area array detector with high resolution; semiconductor laser 1 can also adopt helium-neon laser 1 or other monochromatic light source; two-dimensional array structure π phase plate 2 Can adopt "one" shape, "ten" shape or other types of geometric structures; lens 5 is an f-theta lens 5 optimized for the specific wavelength of semiconduct...

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Abstract

The invention provides a two-dimensional long-range surface profile detection device. The device comprises a monochromatic light source, a two-dimensional array structure pi-phase plate, a beam splitter prism, a guide rail, a pentagonal prism arranged on the guide rail, a lens, a rectangular prism module and a surface profile detector, wherein the monochromatic light source is set to emit a light beam; the beam penetrates through the two-dimensional array structure pi-phase plate, enters the beam splitter prism, enters the pentagonal prism after being split by the beam splitter prism, enters a to-be-detected mirror after being refracted by the pentagonal prism, then is reflected back to the pentagonal prism after being reflected by the to-be-detected mirror, is refracted again through the pentagonal prism, then sequentially penetrates through the beam splitter prism, the lens and the rectangular prism module to the surface profile detector, and forms a measurement light spot on the surface profile detector. According to the two-dimensional long-range surface profile detection device, two-dimensional information of the surface of an optical element is scanned through movement of the guide rail, and large-scale optical element surface quality detection and high-precision bending mechanism detection can be realized.

Description

technical field [0001] The invention relates to surface shape detection of large-scale and high-precision optical elements, in particular to a two-dimensional long-range surface shape detection device and detection method. Background technique [0002] Large-scale optical surfaces are increasingly used, especially in synchrotron radiation beamline engineering and grazing-incidence mirrors in high-power laser systems. The length of the mirror used on the synchrotron radiation hard X-ray beamline can reach 1500mm, and the surface quality requirements are very high, and the surface types range from planar, cylindrical to toroidal. Due to the extremely short wavelength of X-rays, the current optical materials can only work in the state of grazing incidence, and a large incident angle (close to 90°) must be used to achieve high reflectivity, so the optical elements of synchrotron radiation are generally strip-shaped . [0003] The optical components used for synchrotron radiati...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/24G01B11/06
CPCG01B11/0616G01B11/24
Inventor 罗红心张翼飞樊亦辰金利民李中亮王劼
Owner SHANGHAI INST OF APPLIED PHYSICS - CHINESE ACAD OF SCI
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