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Tunable laser beam expanding focusing device

A technology of focusing device and laser beam expansion, which is applied in the field of optics and can solve the problem of high focus error

Inactive Publication Date: 2017-06-20
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide an adjustable laser beam expander focusing device, which can effectively solve the problems of high focusing error and the like

Method used

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  • Tunable laser beam expanding focusing device
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Embodiment Construction

[0022] As mentioned in the background technology section, due to manufacturing errors in the circumferential direction of the front lens of the current laser beam expander, errors will occur when the front lens is rotated to adjust the focus.

[0023] Based on the above research, the embodiment of the present invention provides an adjustable laser beam expander focusing device, which can achieve the purpose of focusing and beam expansion while keeping the front lens not rotating, so that the front lens can be avoided due to the circumferential Manufacturing error, during the rotation process, the focusing error generated.

[0024] In order to make the above objects, features and advantages of the present invention more comprehensible, the specific implementation manners of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0025] In the following description, specific details are set forth in order to provide a thorough und...

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Abstract

The invention discloses a tunable laser beam expanding focusing device, which comprises a main body supporting tube, a focusing tube and a front lens sleeve. The focusing tube is sleeved at the front end of the main body supporting tube; the front lens sleeve is in threaded connection in the focusing tube; and the main body supporting tube is provided with a limit portion for limiting rotation of the front lens sleeve. By rotating the focusing tube, the front lens sleeve moves in the axis direction thereof. Rotation of the main body supporting tube can be limited by the limit portion; when the focusing tube is turned, the front lens sleeve moves in the axis direction thereof, so that a focusing purpose can be realized; when a front lens reaches the innermost side, the focus of the front lens is overlapped with the focus of a back lens, and beams are expanded into parallel beams; and in the process where the front lens moves from the innermost side to the outermost side, the laser focus is focused from infinite distance to near place continuously. Importantly, the purpose of focusing beam expanding can be realized under the condition of enabling the front lens not to rotate, so that focusing error, generated in the rotation process, of the front lens due to circumferential manufacturing errors can be prevented.

Description

technical field [0001] The invention relates to the field of optics, in particular to an adjustable laser beam expander focusing device. Background technique [0002] Laser heterodyne interferometry has been widely used in measurement due to its advantages of high precision and strong environmental adaptability, from measuring the vibration frequency of automobiles to measuring the mode shape of micro-nano devices, among which laser beam expander is the most suitable application key components. At present, the focus methods of the beam expander mainly include rotary focus and electric focus, and most of them will cause the rotation of the front lens. In practical applications, due to the circumferential manufacturing error or assembly error of the front lens, a large focusing error will be generated during the rotation process, so it has certain usage restrictions in high-precision measurement scenarios such as picometers and nanometers. [0003] Therefore, how to provide ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B7/04G02B27/09
CPCG02B7/04G02B27/0905G02B27/0955
Inventor 武俊峰吴一辉舒风风
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI