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Evaporation device and its evaporation method, display device manufacturing equipment

An evaporation and evaporation source technology, applied in vacuum evaporation plating, sputtering plating, ion implantation plating and other directions, can solve the problems of mask wrinkling, affecting the accuracy of substrate evaporation, poor display of display products, etc. The effect of improving evaporation yield and eliminating wrinkle problems

Active Publication Date: 2019-02-22
BOE TECH GRP CO LTD
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

[0002] Vacuum evaporation has been widely used in the preparation process of display devices. However, when the mask plate used for vacuum evaporation is installed on the substrate to be processed, wrinkles may appear in some areas of the mask plate, resulting in mask The plate will not be completely attached to the substrate during the evaporation process, which will affect the evaporation accuracy of the substrate, which will lead to problems such as poor display of the prepared display products

Method used

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  • Evaporation device and its evaporation method, display device manufacturing equipment
  • Evaporation device and its evaporation method, display device manufacturing equipment
  • Evaporation device and its evaporation method, display device manufacturing equipment

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Embodiment Construction

[0031] In order to make the purpose, technical solutions and advantages of the embodiments of the present disclosure clearer, the technical solutions of the embodiments of the present disclosure will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present disclosure. Apparently, the described embodiments are some of the embodiments of the present disclosure, not all of them. Based on the described embodiments of the present disclosure, all other embodiments obtained by persons of ordinary skill in the art without creative effort fall within the protection scope of the present disclosure.

[0032] Unless otherwise defined, the technical terms or scientific terms used in the present disclosure shall have the usual meanings understood by those skilled in the art to which the present disclosure belongs. "First", "second" and similar words used in the present disclosure do not indicate any order, quantity or importan...

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Abstract

An evaporation device and its evaporation method, and display device manufacturing equipment, the evaporation device is used for substrate evaporation, one side of the substrate is provided with a mask plate, the evaporation device includes: a magnetic adsorption layer and a thermal Sensitive layer, wherein the thermosensitive layer is arranged on one side of the magnetic adsorption layer, the thermosensitive layer is arranged between the magnetic adsorption layer and the side of the substrate away from the mask plate, and the The thermosensitive layer is configured to adjust the distance between the mask plate and the magnetic adsorption layer. During the evaporation process of the substrate, when the mask plate used for evaporating the substrate generates wrinkles in a certain area, the temperature of the heat-sensitive layer in the corresponding area will be changed, and the heat-sensitive layer adjusts its own thickness according to the temperature change to reduce The distance between the magnetic adsorption layer and the mask plate in this area can eliminate the wrinkle problem of the mask plate and improve the evaporation yield of the substrate.

Description

technical field [0001] At least one embodiment of the present disclosure relates to an evaporation device, an evaporation method thereof, and a display device manufacturing device. Background technique [0002] Vacuum evaporation has been widely used in the preparation process of display devices. However, when the mask plate used for vacuum evaporation is installed on the substrate to be processed, wrinkles may appear in some areas of the mask plate, resulting in mask The plate will not be completely attached to the substrate during the evaporation process, which will affect the evaporation accuracy of the substrate, thus causing problems such as poor display of the prepared display products. Contents of the invention [0003] At least one embodiment of the present disclosure provides an evaporation device, an evaporation method thereof, and a display device manufacturing equipment to solve the above problems. [0004] At least one embodiment of the present disclosure pro...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/24C23C14/04
CPCC23C14/042C23C14/24
Inventor 杜小波
Owner BOE TECH GRP CO LTD
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