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Check assembly part, macroscopic check system and related check method

A technology of macro inspection and inspection team, applied in the field of macro inspection system, which can solve the problems of low inspection efficiency and inability to work.

Pending Publication Date: 2017-08-18
JIANGSU HONGXIN YITAI INTELLIGENT EQUIP CO LTD
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  • Abstract
  • Description
  • Claims
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AI Technical Summary

Problems solved by technology

Moreover, the positioning observation and imaging mechanism cannot work when the automatic pointing device moves. Only when the pointing device is recording the coordinates and returning to the origin, the positioning observation and imaging mechanism can reach the designated position according to the recorded coordinates, and then extract the defect picture
But such a check is not efficient

Method used

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  • Check assembly part, macroscopic check system and related check method
  • Check assembly part, macroscopic check system and related check method
  • Check assembly part, macroscopic check system and related check method

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Embodiment Construction

[0023] The inventor of the present invention integrated the automatic pointing mechanism and the positioning observation and imaging mechanism for the first time, that is, the two actually become a "point observation module". Thus, the automatic pointing mechanism and the positioning observation mechanism can be moved synchronously to the same position, for example, the coordinate position of the defect.

[0024] In this paper, the automatic indicating mechanism may include several components to realize the automatic indicating function, but they are called "automatic indicating mechanism" as an organic whole. Similarly, the positioning observation and imaging mechanism may include several components to achieve different functions such as positioning, observation, imaging, etc., but it is called a "positioning observation and imaging mechanism" as an organic whole. In a word, in the present invention, the automatic pointing mechanism and the positioning observation and imaging...

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Abstract

The invention provides a check assembly part which comprises an automatic indicating mechanism and a locating, observing and imaging mechanism. The check assembly part is characterized in that the automatic indicating mechanism and the locating, observing and imaging mechanism are integrated, and the automatic indicating mechanism and the locating, observing and imaging mechanism can integrally connected through an installation bottom plate or directly integrally connected. The invention further provides a macroscopic check system which comprises an operation platform, a substrate supporting mechanism and the check assembly part, wherein the check assembly part is arranged on the operation platform or the substrate supporting mechanism. The invention further provides a method for using the check assembly part or the macroscopic check system to check glass substrate, especially panel display glass substrates.

Description

technical field [0001] The present invention generally relates to an inspection assembly, especially for (flat panel display) glass substrates, and a macroscopic inspection system comprising the inspection assembly. The invention also relates to methods of inspecting (flat panel display) glass substrates using the inspection assembly and macro inspection system. Background technique [0002] At present, with the development of technology and market demand, the requirements for the pixels and aperture ratio of the flat panel display substrate are getting higher and higher. Therefore, the wiring of flat panel display substrates is developing toward miniaturization, and the array of flat panel display substrates is developing toward cellularization, which intensifies the difficulty of inspecting and positioning defects of flat panel display substrates. [0003] In the macroscopic inspection systems that are common in the market at present, the automatic pointing device and the...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/95
CPCG01N21/95G01N2021/9511
Inventor 邓永松李青丁力刘磊蔡杰李兆廷权永春
Owner JIANGSU HONGXIN YITAI INTELLIGENT EQUIP CO LTD
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