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Methods and apparatus for cleaning ion sources

An ion source and clean technology, applied in the field of clean ion sources, can solve the problems of effectiveness degradation

Active Publication Date: 2020-04-14
KRATOS ANALYTICAL
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0011] The inventors have found that while the method proposed in GB2486628 works well, the effectiveness of the cleaning method proposed in GB2486628 may start to deteriorate after a relatively small number of cleaning cycles

Method used

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  • Methods and apparatus for cleaning ion sources
  • Methods and apparatus for cleaning ion sources
  • Methods and apparatus for cleaning ion sources

Examples

Experimental program
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Embodiment Construction

[0086] 1. Analysis of existing cleaning methods

[0087] figure 1 (a) shows a MALDI ion source 100 that is not an embodiment of the invention, but is included for better understanding of the invention.

[0088] figure 1 The MALDI ion source 100 shown in (a) has a sample holder for supporting a sample material to be ionized by the MALDI ion source 100 . The sample holder includes a sample plate 110 detachable from the MALDI ion source 100 for supporting the crystalline mixture of the sample material and the light absorbing matrix (matrix) in the sample point 120, and a sample plate 110 non-removable from the MALDI ion source 100 for carrying the sample plate 110. template carrier 112 .

[0089] The MALDI ion source 100 also has a laser for ionizing the sample material by emitting a light pulse, in this example a pulse of UV light, in the form of a pulsed laser beam traveling along the beam axis 130 towards the sample material (not shown). show). Such as figure 1 As sho...

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Abstract

A method of cleaning an ion source. The method includes: reflecting, on a first reflective surface of the mirror, light having a wavelength in a first wavelength band onto a surface of the ion source to desorb contaminant material from the surface of the ion source; surface, reflecting light having a wavelength within a second wavelength band and coming from a surface of the ion source toward an imaging device for generating an image of the surface of the ion source, wherein the light having a wavelength within the second wavelength band is in the second wavelength band of the mirror The first reflective surface of the mirror passes through the second reflective surface before being reflected.

Description

technical field [0001] The present invention relates to methods and apparatus for cleaning ion sources. Background technique [0002] Time-of-flight ("TOF") mass spectrometry is an analytical technique used to measure the mass / charge ratio of ions by accelerating them and measuring their flight time to an ion detector. [0003] Matrix-Assisted Laser Desorption / Ionization, often referred to as "MALDI", is an ionization technique in which typically a laser is used to emit light at a (usually crystalline) mixture of sample material and a light-absorbing matrix to ionize the sample material. Sample materials for use with MALDI typically include molecules such as biomolecules (eg, proteins), large organic molecules and / or polymers. Light-absorbing matrices are often used to protect such molecules from damage or destruction by light from lasers. The resulting ions, typically with a mass of several thousand Daltons, are then accelerated to high kinetic energies, typically around ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B08B7/00H01J49/16
CPCB08B7/0035B08B7/0042B08B7/0057H01J49/164H01J49/10H01J2237/022
Inventor 马克·约翰·奎托斯
Owner KRATOS ANALYTICAL
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