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Substrate container valve assemblies

A technology of assemblies and containers, which is applied in semiconductor/solid-state device manufacturing, control valves, valve devices, etc., can solve problems such as being susceptible to compression force, leakage, and frame deformation of check valves, and achieves a high level of ease

Pending Publication Date: 2017-08-29
ENTEGRIS INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Additionally, some flushometer designs are susceptible to compressive forces during installation, which can deform the frame of the check valve and cause leakage

Method used

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  • Substrate container valve assemblies
  • Substrate container valve assemblies
  • Substrate container valve assemblies

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0036] figure 1 An example wafer container assembly 2 is illustrated in which embodiments of the present invention may be implemented. Container assembly 2 includes wafer carrier 4 , bottom door 6 and housing portion 8 . The bottom door 6 is adapted to sealingly couple with the housing portion 8 to define an interior space that can be isolated from the surrounding atmosphere 10 . like figure 1 As shown in , the wafer carrier 2 may include a plurality of elements 12 (eg, shelves) that may hold and position a plurality of silicon wafers or other substrates within the wafer carrier 2 . In general, element 12 holds and positions the substrate such that contact between adjacent wafers is minimized, which may reduce damage to the substrate that may occur during handling and / or shipping.

[0037] figure 2 An example bottom door 6 is illustrated in more detail. Section 6 comprises access structures in the form of openings 14 , 16 . According to one embodiment, the opening 14 ...

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PUM

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Abstract

A substrate container includes a container portion having an open side or bottom, and a door to sealingly close the open side or bottom, one of the door and the container portion defining access structure. The substrate container additionally includes a check-valve assembly, the check-valve assembly being retained with respect to the access structure to provide fluid communication with an interior of the substrate container. The check-valve assembly includes a grommet, the grommet being formed of an elastomeric material. A valve seat is disposed within the grommet, the valve seat being integrally formed with the grommet according to one aspect, and being formed of a separate piece according to another aspect. An elastomeric valve member, specifically an elastomeric umbrella valve member according to one aspect, is disposed within the grommet and held to engage the valve seat, thereby restricting fluid flow through the check-valve assembly with respect to the interior of the substrate container.

Description

[0001] priority claim [0002] This application claims priority to US Provisional Application No. 62 / 086,022, filed December 1, 2014. Background technique [0003] In general, substrate containers or carriers are used to transport and / or store batches of silicon wafers or disks before, during and after processing the wafers or disks. The wafers can be processed into integrated circuits and the disks can be processed into memory disks for computers. The terms wafer, disc, and substrate are used interchangeably herein and any of these terms may refer to semiconductor wafers, magnetic disks, flat panel substrates, reticles, and other such substrates, unless otherwise indicated. [0004] Processing wafer disks into integrated circuit chips typically involves multiple steps, with the disks being processed at various processing stations, and stored and transported between processing steps. Due to the fragile nature of the discs and their susceptibility to contamination by particl...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F16K15/14F16K27/02H01L21/673
CPCF16K15/148F16K27/0209H01L21/67379H01L21/67393H01L21/6732
Inventor 马修·A·富勒马克·V·史密斯杰弗里·J·金约翰·伯恩斯
Owner ENTEGRIS INC