A kind of preparation method of hollow microchannel structure
A micro-channel structure and micro-channel technology, applied in the application field, can solve the problems of high cost, high process requirements, and difficult to control the size of the micro-channel, and achieve the effects of low production cost, large application prospects, and easy and precise control.
Active Publication Date: 2018-08-14
LUDONG UNIVERSITY
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Problems solved by technology
[0006] The present invention can solve the problems of the existing method for preparing hollow microchannels, such as high technical requirements, difficulty in controlling the size of microchannels, high cost, etc., and provides a novel preparation method for hollow microchannel structures
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specific Embodiment approach
[0014] Specific embodiments: a method for preparing a hollow microchannel structure, which is completed by the following steps:
[0015] Step 1. Preparation of the microchannel master. Clean the substrate used and spin-coat AZ9260 photoresist on it; after standing for ten minutes, heat it on a 65°C hot plate for 10 minutes, then move to 95°C ℃ heating on a hot plate for 30 minutes; then the photolithographic mask plate with long strip micron pattern is in close contact with the AZ9260 photoresist coating, and photolithographic exposure is carried out; the exposed substrate can be obtained by developing A strip-shaped micro-square structure with the same size as the opaque part of the mask pattern; place this strip-shaped micro-square structure on a hot plate, slowly raise the temperature to 140°C, take it off after heating for 30 minutes, and let it cool naturally to room temperature; the AZ9260 photoresist at 140°C is already in a molten state, and it flows under the action o...
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The invention discloses a preparation method of a hollow micro-channel structure, and specifically relates to the field of micro machining. The method comprises the following steps: making a micron-sized micro-channel master mask by a photoetching technology and a hot reflux technology; making a PDMS (Polydimethylsiloxane) flexible template by using the master mask, wherein the obtained flexible substrate has a pattern structure complementary to the micro-channel master mask; tightly attaching the PDMS flexible template to the surface of a chip to form a micro-channel cavity; dripping S1813 photoresist on one side; filling the micro-channel cavity with the photoresist under the action of capillary force; heating after filling for a long time, wherein the photoresist in the micro-channel cavity reflows, so that the photoresist in contact with an inner wall of the micro-channel cavity is attached to the inner wall; cooling, curing and removing the PDMS flexible template to obtain the hollow micro-channel structure on the surface of the chip. Compared with other methods for preparing a hollow micro-channel, the preparation method disclosed by the invention has the advantages of low cost, simple process and the like. The preparation method is suitable for the application fields of micro machining, micro-fluidic chips, biomedicine and the like.
Description
technical field [0001] The invention relates to application fields such as micromachining, microfluidic chips, and biomedicine, and in particular to a method for preparing a hollow microchannel structure. Background technique [0002] People's research on channels has already developed from the initial pipes and various coils to various radiator channels and cavities simulating the living environment of cells, and correspondingly, its size ranges from meters, millimeters, to microns . With the development of micro-processing technology, since the 1950s and 1960s, scientists have begun to apply micro-channels to various heat exchangers, reactors, and medically simulate the circulation of blood in human blood vessels. [0003] Capillarity is a common physical phenomenon in nature. It is well known that surface tension will be generated when a liquid contacts the surface of an object. Under the action of this surface tension, the liquid will move along the contact surface. If...
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IPC IPC(8): B81C1/00
CPCB81C1/00071B81C1/00119B81C1/00388B81C1/00523B81C2201/0156
Inventor 张登英刘鑫李自万袁慧敏李宏光赵风周张立春曲崇
Owner LUDONG UNIVERSITY