A kind of evaporation source and evaporation device
A technology of evaporation source and cooling device, which is applied in the field of evaporation source and evaporation device, can solve the problem of low energy utilization rate of evaporation source, achieve the effects of lowering temperature, improving utilization rate, and reducing waste
Active Publication Date: 2019-04-16
BOE TECH GRP CO LTD +1
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Problems solved by technology
[0005] In order to solve the problem of low energy utilization of the existing evaporation source, the embodiment of the present invention provides an evaporation source and an evaporation device
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[0024] In order to make the object, technical solution and advantages of the present invention clearer, the implementation manner of the present invention will be further described in detail below in conjunction with the accompanying drawings.
[0025] figure 1 It is a structural schematic diagram of an evaporation source provided by an embodiment of the present invention. Such as figure 1 As shown, the evaporation source includes a crucible 10 , a heating wire 20 , a reflector 30 , a thermoelectric sheet 40 and a cooling device 50 . The heating wire 20 is arranged around the crucible 10 , the reflector 30 is arranged around the crucible 10 , the cooling device 50 is arranged outside the reflector 30 , and the thermoelectric sheet 40 is arranged between the reflector 30 and the cooling device 50 .
[0026] Wherein, a gap may be provided between the heating wire 20 and the outer wall of the crucible 10 to facilitate the removal of the crucible 10 . In addition, the heating wi...
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The invention discloses an evaporation source and an evaporation device, and belongs to the field of semiconductor process equipment. The evaporation source comprises a crucible, a heating wire, a reflecting plate and a cooling device, wherein the heating wire is arranged around the crucible, the reflecting plate is arranged around the crucible, and the cooling device is arranged outside the reflecting plate; and the evaporation source further comprises a thermoelectric power generation piece arranged between the reflecting plate and the cooling device. According to the evaporation source, the thermoelectric power generation piece is arranged between the reflecting plate and the cooling device, due to the fact that a temperature difference exists between the reflecting plate and the cooling device, the thermoelectric power generation piece can generate certain electric energy by utilizing the temperature difference, and therefore a part of energy can be recycled, the energy waste is reduced, and the utilization rate of energy is improved.
Description
technical field [0001] The invention relates to the field of semiconductor process equipment, in particular to an evaporation source and an evaporation device. Background technique [0002] Evaporation is a process technology that heats materials such as metals to evaporate or sublimate, and then makes the formed vapor precipitate on low-temperature parts to form a thin film. This process is widely used in semiconductor processes, for example, it can be used to prepare films such as electrodes of OLEDs (Organic Light Emitting Diodes, organic light emitting diodes). [0003] In the evaporation process, the equipment used to generate steam is called an evaporation source. The evaporation source mainly includes a crucible, a heating wire, a reflector and a cooling device. The heating wire is arranged on the outer wall of the crucible to heat the crucible. The reflection plate surrounds the heating wire and is used to reflect the heat radiated from the heating wire and the cruc...
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IPC IPC(8): C23C14/26C23C14/54
CPCC23C14/243C23C14/26C23C14/54
Inventor 段廷原姚固邹清华王玉谢虎付潇曾苏伟
Owner BOE TECH GRP CO LTD