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Centering device for detecting objects

A technology for detecting objects and centering devices, which is applied to measuring devices, parts of electrical measuring instruments, and measuring electronics. Reverse insertion and mis-insertion, the effect of helping accuracy

Active Publication Date: 2017-11-24
伸龙有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

As a result, it is difficult to arrange the correct center of gravity position for various types of objects, so the quality of the detection object is lowered

Method used

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  • Centering device for detecting objects
  • Centering device for detecting objects
  • Centering device for detecting objects

Examples

Experimental program
Comparison scheme
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Embodiment Construction

[0039] Hereinafter, a preferred embodiment of the present invention will be described with reference to the drawings.

[0040] refer to figure 1 According to a preferred embodiment of the present invention, the centering device 1 for detecting objects includes a centering unit 10 and a fixing unit 90 .

[0041] For reference, the centering device 1 for detecting an object described in the present invention is suitable for a detector that arranges an object 0 that requires a high-precision manufacturing process such as a substrate to a central position to detect a mass.

[0042] The centering unit 10 moves with respect to the object 0 in the X-axis direction in the first direction and in the Y-axis direction in the second direction, and arranges the center position of the object 0 . These centering units 10 include a position determining part 20 , a center pressurizing part 50 and a supporting part 80 .

[0043] The position determination unit 20 is as figure 2 The illustra...

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PUM

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Abstract

A centering device for detecting the contour of an object according to the present invention includes a centering unit for aligning a center position of an object with respect to an object moving in X-axis and Y-axis directions, and a fixing unit having a fixed center position And the centering unit and the fixing unit are provided with a buffer that attenuates the driving force when they come in contact with the object. These components can help to improve the accuracy of the object's center position and improve the quality of detection.

Description

technical field [0001] The present invention relates to a centering device for a detection object, and more particularly, to a centering device for guiding centering for shape detection of a detection object. Background technique [0002] Usually, the manufacture of semiconductor wafer substrates or liquid crystal glass substrates goes through multiple processes, and in the final process, object quality inspections such as substrates are performed in order to detect defects. In the quality inspection of these objects, the object is placed at the correct center of gravity for shape inspection. [0003] A common centering device for setting the center positions of these objects arranges the center positions of the objects according to the same specification regardless of the kind of objects. As a result, it is difficult to align various types of accurate center-of-gravity positions for objects, resulting in a decrease in the quality of objects to be detected. Therefore, ther...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/01G01N21/95
CPCG01N21/01G01N21/95G01N2021/0112G01N2021/9513G01R1/0408G01R1/0491G01R3/00G01R31/2893
Inventor 柳光龙
Owner 伸龙有限公司