Two-dimensional fast deflection stage and method integrating sensing unit and restraint element
A technology of sensing units and components, which is applied to the parts of instruments, measuring devices, instruments, etc., can solve the problems of small actuation stroke and high driving voltage, and achieve the effect of large driving stroke, low driving voltage and improved stability
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[0019] The present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments.
[0020] Such as figure 1 and figure 2 As shown, the present invention is a two-dimensional rapid deflection table integrating sensing unit and constraining elements, including a base 2, a rigid support 5 located at the center of the base 2, and a biaxial flexible hinge 10 connected to the rigid support 5 The connected micro-angular pendulum platform 1; also includes the X-axis angular displacement sensing and measuring device 3 and the Y-axis angular displacement sensing and measuring device 4 connected with the lower surface of the micro-angular pendulum platform 1 through a biaxial flexible hinge, distributed in X The first voice coil motor 6 and the second voice coil motor 8 between the axis angular displacement sensing and measuring device 3 and the base 2, and the third voice coil distributed between the Y-axis angular displacem...
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