Roll angle measuring device for linear guide rails
A roll angle measurement, linear guide technology, applied in the direction of measurement device, measurement angle, surveying and navigation, etc., can solve the problem of high processing and manufacturing cost of the long mirror, and achieve the effect of convenient adjustment of the optical path
Active Publication Date: 2017-12-12
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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Problems solved by technology
The measurement accuracy needs to be guaranteed by strictly controlling the flatness of the external reflector, and the manufacturing cost of the long mirror with high flatness is very high
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[0018] In order to better understand the purpose, technical solutions and advantages of the present invention, the present invention will be further described below in conjunction with the accompanying drawings and embodiments, but the protection scope of the present invention should not be limited thereby.
[0019] Roll angle measuring method of the present invention realizes based on the following principles:
[0020] After the autocollimator light source passes through the first pentaprism 2 and the second pentaprism 3, it is vertically incident on the plane reflector 4 located on the linear guide rail 6 to be tested. During the roll angle measurement process, the auxiliary linear guide rail 5 and the The linear guide rail 6 keeps moving at a similar speed and in the same direction.
[0021] Due to the pitch, yaw, and roll angle errors of the auxiliary linear guide 5 during the movement, the first pentaprism 2 and the second pentaprism 3 rotate at a certain angle during the...
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The invention discloses a roll angle measuring device for linear guide rails. The roll angle measuring device comprises an autocollimator, a first pentaprism, a second pentaprism, a planar reflecting mirror, an auxiliary linear guide rail, an auxiliary linear guide rail controller, a to-be-measured linear guide rail controller and a computer. The auxiliary linear guide rail and a to-be-measured linear guide rail keep moving in identical directions at close speeds in measurement procedures, and accordingly roll angles of the to-be-measured linear guide rail can be measured. The roll angle measuring device has the advantages that elongated mirrors used as in-vitro reflecting mirrors are omitted, and accordingly the measurement cost can be saved; the problem of interference of pitch angles, deflection angles and roll angles of existing auxiliary linear guide rails on measurement of roll angles of existing to-be-measured linear guide rails can be solved in the measurement procedures, and the measurement accuracy can be improved; measurement results are free of influence of the locations and angles of the pentaprisms in the roll angle measuring device, light paths are convenient to adjust, and the roll angle measuring device is high in measurement speed and low in measurement cost.
Description
technical field [0001] The invention relates to the technical field of photoelectric detection, in particular to a non-contact optical detection device for the roll angle of a linear guide rail. Background technique [0002] There are three rotational degrees of freedom or angular motion errors (pitch, yaw, and roll errors) for mechanical rail motion. In the field of high-precision machining inspection, these angular motion errors will cause Abbe errors through the Abbe arm in this direction, thereby affecting the processing or inspection accuracy. Among the six-degree-of-freedom errors, the five errors of positioning error, two-dimensional straightness error, pitch angle error and yaw angle error can be measured with high precision using the currently commercialized interferometer. However, there are great difficulties in the measurement of the roll angle error, which is the most difficult parameter to detect in the six degrees of freedom error, and its detection method ha...
Claims
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Inventor 卢云君唐锋王向朝
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI