mems microphone
A microphone and substrate technology, which is applied in the field of acoustics and electricity, can solve the problems of small effective capacitance and low performance of MEMS microphones, and achieve the effects of improving acoustic performance, increasing effective use area, and increasing effective capacitance
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[0020] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0021] Please also see Figure 1-3 , the present invention provides a MEMS microphone 100 , including a substrate 1 , a back plate 2 , a vibrating membrane 3 and a support portion 4 .
[0022] The base 1 has an acoustic cavity 11 running through it, and the base 1 is made of a silicon-based material and shaped by MEMS technology.
[0023] The back plate 2 is fixed on the base 1 . Specifically, the back plate 2 includes a back plate 21 and a fixed electrode 2...
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