mems microphone

A microphone and substrate technology, which is applied in the field of acoustics and electricity, can solve the problems of small effective capacitance and low performance of MEMS microphones, and achieve the effects of improving acoustic performance, increasing effective use area, and increasing effective capacitance

Active Publication Date: 2021-04-09
AAC ACOUSTIC TECH (SHENZHEN) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, in the MEMS microphone of the related art, the area of ​​the fixed electrode is smaller than the effective vibration area of ​​the diaphragm, so that the effective capacitance of the MEMS microphone is relatively small, resulting in its low performance.

Method used

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Embodiment Construction

[0020] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0021] Please also see Figure 1-3 , the present invention provides a MEMS microphone 100 , including a substrate 1 , a back plate 2 , a vibrating membrane 3 and a support portion 4 .

[0022] The base 1 has an acoustic cavity 11 running through it, and the base 1 is made of a silicon-based material and shaped by MEMS technology.

[0023] The back plate 2 is fixed on the base 1 . Specifically, the back plate 2 includes a back plate 21 and a fixed electrode 2...

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Abstract

The invention provides a MEMS microphone, comprising a base with an acoustic cavity, a back plate fixed to the base, and a vibrating membrane that is spaced apart from the back plate to form a capacitive structure, and the back plate includes a back plate and fixed electrodes; the vibrating membrane includes an effective vibrating part and an ineffective vibrating part, the effective vibrating part includes a vibrating body facing the acoustic cavity and a fixed arm extending from the vibrating body and fixed to the base, The vibrating body and the part of the fixed arm facing the acoustic cavity jointly form an effective vibration area; the ineffective vibration part is located between two adjacent fixed arms and is spaced apart from the effective vibration part, so The invalid vibration part is at least partially fixed on the base; the fixed electrode has the same shape as the effective vibration area. Compared with related technologies, the MEMS microphone of the invention has better acoustic performance.

Description

technical field [0001] The invention relates to the field of sound and electricity, in particular to a MEMS microphone used in portable electronic products. Background technique [0002] With the development of communication technology, there are more and more mobile phone users around the world. Users' demand for mobile phones is not only satisfied with calls, but also to be able to provide high-quality call effects, especially the current development of mobile multimedia technology. The call quality of the phone is more important, and the microphone of the mobile phone is used as the voice pickup device of the mobile phone, and its design directly affects the call quality. [0003] Microphones in the related art, particularly MEMS microphones, include a base with an acoustic cavity, a back plate fixed to the base, a fixed electrode fixed to the north plate, and fixed to the base and spaced apart from the back plate to Forms the diaphragm of the capacitive structure. The ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H04R1/08H04R7/02H04R7/16
CPCH04R1/08H04R7/02H04R7/16
Inventor 张睿
Owner AAC ACOUSTIC TECH (SHENZHEN) CO LTD
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